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  • Inlet Connection
  • Outlet Connection
  • Industry
  • Process
Chambergard FV50 Gass Diffusers rapidly reduce particles and vent times in load lock and transfer chambers and feature an efficient and robust Ni disk membrane.
Inlet Connection
  • 1/4" VCR® compatible male gasket seal fitting
Outlet Connection
  • ISO NW50 bulkhead mounting compatible with standard ISO bulkhead clamps
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
The Chambergard Max Gas Diffusers deliver high-volume throughput and rapid venting to atmosphere.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Chambergard™ Fast Vent Diffusers reduce particles and vent times in load lock and transfer chambers. Achieve rapid venting without disturbing or adding particles to wafers.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
Chambergard™ BGN Fast Vent diffusers deliver high-volume throughput and rapid venting to atmosphere. Patented sintered nickel filter element quickly diffuses the flow of incoming gas.
Inlet Connection
  • Gasket seal
  • Butt weld
Outlet Connection
  • ISO NW bulkhead mounting compatible vacuum flange
  • None (flangeless)
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
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