Chambergard™ Fast Vent Diffusers
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***Part Number WG3D401R2 Includes connector kit; P71917 Bolts and Washers
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Applications
- Provide rapid gas venting to atmosphere without disturbing or adding particles to wafers in the chamber
Specifications
| Materials | Diffuser element: Patented, sintered nickel membrane filter |
| Housing: 316L stainless steel | |
| Surface finish internal: ≤32 μin Ra | |
| Performance | Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow |
| Removal rating: ≥0.0015 μm | |
| Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F) | |
| Connections | Refer to data sheet |
| Operating conditions | Refer to data sheet |
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Part Numbers
***Part Number WG3D401R2 Includes connector kit; P71917 Bolts and Washers
| Part Number | O-ring Size | O-ring Groove OD | Outlet Connection Type | O-ring Groove ID | O-ring Groove depth | Operating conditions, Maximum Inlet Pressure with outlet to vacuum | Operating conditions, Maximum differential pressure | Operating conditions, Maximum operating Temperature | Inlet Connection Type |
|---|---|---|---|---|---|---|---|---|---|
| SI2P134R5 | None | None | In-Line | None | None | 0.5 MPa (75 psi) | 0.24 MPa (35 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D16TR2 | 2-117 | 26.4 mm (1.03") | ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps | 20.3 mm (0.79") | 1.9 mm (0.07") | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D228R2 | 2-117 | 26.4 mm (1.03") | ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps | 20.3 mm (0.79") | 1.9 mm (0.07") | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male or female gasket seal fitting or butt weld fitting |
| WG3D25LR2 | 2-123 | 35.9 mm (1.41") | ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps | 29.8 mm (1.17") | 1.9 mm (0.07") | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D25SR2 | 2-123 | 35.9 mm (1.41") | ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps | 29.8 mm (1.17") | 1.9 mm (0.07") | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D3LBW2 | None | None | None | None | None | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 20 mm butt weld tube stub |
| WG3D401R2 | 2-246 | 114.3 mm (4.50") | ISO NW-100, bolt through | 122.4 mm (4.81) | 2.6 mm (0.10") | 0.25 MPa (35 psi) | 0.35 MPa (50 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D40DR2 | 2-224 | 52.1 mm (2.05") | ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps | 44 mm (1.73") | 2.6 mm (0.10") | 0.3 MPa (45 psi) | 0.4 MPa (60 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D40TR2 | 2-224 | 52.1 mm (2.05") | ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps | 44 mm (1.73") | 2.6 mm (0.10") | 0.7 MPa (100 psi) | 0.8 MPa (115 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |
| WG3D50DR2 | 2-229 | 67.9 mm (2.67") | ISO NW-50, bulkhead mounting compatible with standard ISO bulkhead clamps | 59.9 mm (2.35") | 2.6 mm (0.10") | 0.2 MPa (30 psi) | 0.3 MPa (45 psi) | 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring | 1/4" VCR® compatible male gasket seal fitting |