Wafergard® III NF-30 In-line Gas Filters
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- Bulk gas delivery
- Photolithography
- Deposition
- Dry etch
- Ion implantation
Note: Not recommended for use with CO, O3, and low level hydride dopant gases.
Specifications
Materials | Filter membrane | Patented, sintered nickel |
Housing | Electropolished F20 stainless steel | |
Downstream cleanliness | Particles* | <0.03 particles/Liter (<1 particle/ft3) >0.01 µm |
Volatiles** | Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) | |
Removal rating | ≥0.0015 µm | |
Surface finish interior | ≤5 µin Ra | |
Helium leak rate | Qualified | 2x10-10 atm cc/sec |
Tested | 1x10-9 atm cc/sec | |
Maximum operating conditions | Maximum inlet pressure: | 70 bar (1000 psi) @ 100°C (212°F) |
Maximum forward/reverse differential pressure: | 10 bar (150 psid) | |
Maximum operating temperature | Inert gases | 400°C (752°F) at 35 bar (500 psi) |
Corrosive and reactive gases | 50°C (122°F) at 70 bar (1000 psi) | |
Warranty | 5 year | |
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at 30 slpm | |
Greater than 99.9999% removal of all particles at 75 slpm (referenced at the most penetrating particle size) | ||
Flow rate | Refer to flow curve |
*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD)
**Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD)
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length |
---|---|---|
WG3NS3FF2 | 1/4" Gasket seal (compatible with VCR fitting) female inlet/outlet | 58.4 mm (2.30") |
WG3NS3JJ2 | 1/4" Butt weld tube | 28.4 mm (1.12") |
WG3NS3RF2 | 1/4" Polarized gasket seal (compatible with VCR fitting) male inlet/female outlet | 71.1 mm (2.80") |
WG3NS6RR2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") |
WG3NS6SL2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet, short Version | 58.7 mm (2.31") |