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Wafergard® II F Mini XL In-line Gas Filters

Superior particulate filtration in gas panels, gas cabinets, and anywhere ultrapure gas is required for wafer processing.

  • Compact unit reduces overall gas box footprint, saving valuable equipment space
  • PTFE membranes provide high-efficiency filtration, improving product yield
  • Low pressure drop reduces the risk of condensation in low vapor pressure gases
  • Excellent compatibility with all classes of semiconductor process gases
  • For use with inert and reactive gases, including ozone
  • Read More Read Less
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