Wafergard® MAX In-line PTFE Gas Filters
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- Compatible with all classes of semiconductor process gases
- Compatible with general nitrogen and CDA applications
Specifications
Materials | Filter element | Hydrophobic PTFE membrane supported by molded PFA structures |
Housing | Electropolished low sulfur 316L stainless housing | |
Downstream cleanliness | Particles | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
Volatiles (Silver) | <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb) | |
Removal rating | ≥0.0015 μm | |
Surface finish interior | WGMX (Bronze) MB XXXX | ≤20 μin Ra |
WGMX (Silver/Bronze Plus) MS XXX/XXX | ≤7 μin Ra | |
Helium leak rating | Qualified | 2 x 10-10 atm-cc/sec |
Tested | 1 x 10-9 atm-cc/sec | |
Operating conditions |
Maximum inlet pressure |
Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig) |
Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig) | ||
Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig) | ||
Maximum forward differential pressure | 7 bar (102 psid) | |
Maximum reverse differential pressure | 2.5 bar (36 psid) | |
Maximum operating temperature | 120°C (248°F) | |
Flow rating | Refer to performance data | |
Warranty | Bronze | 1 year |
Silver | 3 years | |
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) |
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length |
---|---|---|
WGMXMBPRF2 | 1/4" male VCR® compatible inlet, 1/4" female VCR® compatible outlet | 141.2 mm (5.6") |
WGMXMBRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
WGMXMBRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |
WGMXMBSS2 | 1/4" Swagelok® compatible | 112.7 mm (4.44") |
WGMXMBSS3 | 3/8" Swagelok® compatible | 117.9 mm (4.64) |
WGMXMBSS4 | 1/2" Swagelok® compatible | 118.7 mm (4.67") |
WGMXMPRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
WGMXMPRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |
WGMXMPSS2 | 1/4" Swagelok® compatible | 112.7 mm (4.44") |
WGMXMPSS3 | 3/8" Swagelok® compatible | 117.9 mm (4.64) |
WGMXMPSS4 | 1/2" Swagelok® compatible | 118.7 mm (4.67") |
WGMXMSBW2 | 1/4" Butt weld tube | 133.4 mm (5.25") |
WGMXMSBW3 | 3/8" butt weld tube | 133.4 mm (5.25") |
WGMXMSBW4 | 1/2" Butt weld tube | 133.4 mm (5.25") |
WGMXMSRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
WGMXMSRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |