Wafergard® MAX In-line PTFE Gas Filters
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Applications
- Compatible with all classes of semiconductor process gases
- Compatible with general nitrogen and CDA applications
Specifications
| Materials | Filter element | Hydrophobic PTFE membrane supported by molded PFA structures |
| Housing | Electropolished low sulfur 316L stainless housing | |
| Downstream cleanliness | Particles | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm |
| Volatiles (Silver) | <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb) | |
| Removal rating | ≥0.0015 μm | |
| Surface finish interior | WGMX (Bronze) MB XXXX | ≤20 μin Ra |
| WGMX (Silver/Bronze Plus) MS XXX/XXX | ≤7 μin Ra | |
| Helium leak rating | Qualified | 2 x 10-10 atm-cc/sec |
| Tested | 1 x 10-9 atm-cc/sec | |
| Operating conditions |
Maximum inlet pressure |
Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig) |
| Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig) | ||
| Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig) | ||
| Maximum forward differential pressure | 7 bar (102 psid) | |
| Maximum reverse differential pressure | 2.5 bar (36 psid) | |
| Maximum operating temperature | 120°C (248°F) | |
| Flow rating | Refer to performance data | |
| Warranty | Bronze | 1 year |
| Silver | 3 years | |
| Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) | |
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Part Numbers
| Part Number | Fitting Size and Type | Length |
|---|---|---|
| WGMXMBPRF2 | 1/4" male VCR® compatible inlet, 1/4" female VCR® compatible outlet | 141.2 mm (5.6") |
| WGMXMBRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
| WGMXMBRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |
| WGMXMBSS2 | 1/4" Swagelok® compatible | 112.7 mm (4.44") |
| WGMXMBSS3 | 3/8" Swagelok® compatible | 117.9 mm (4.64) |
| WGMXMBSS4 | 1/2" Swagelok® compatible | 118.7 mm (4.67") |
| WGMXMPRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
| WGMXMPRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |
| WGMXMPSS2 | 1/4" Swagelok® compatible | 112.7 mm (4.44") |
| WGMXMPSS3 | 3/8" Swagelok® compatible | 117.9 mm (4.64) |
| WGMXMPSS4 | 1/2" Swagelok® compatible | 118.7 mm (4.67") |
| WGMXMSBW2 | 1/4" Butt weld tube | 133.4 mm (5.25") |
| WGMXMSBW3 | 3/8" butt weld tube | 133.4 mm (5.25") |
| WGMXMSBW4 | 1/2" Butt weld tube | 133.4 mm (5.25") |
| WGMXMSRR2 | 1/4" male VCR® compatible | 127 mm (5.00") |
| WGMXMSRR4 | 1/2" male VCR® compatible | 127 mm (5.00") |