Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters

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Provide the industry’s best filter in a compact surface-mount design.

Compact design eliminates the need for dedicated filter space resulting in footprint reduction.
Filtration provided as gas is returning ensuring cleanliness and protection of downstream devices.
Provides ultimate purity, superior corrosion resistance, and excellent compatibility.

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Applications Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters Applications

Ultrapure gas lines
High temperature applications
Dynamic pressure applications

Specifications

Drawings

Performance Data

Product Specifications

Materials of construction	Membrane		Patented, sintered nickel membrane or stainless steel membrane
	Housing base block		316 L double-melt stainless steel electropolished, SEMI® F20
	Helium Leak Rating		Qualified	2 × 10^-10 cc/min.
			Tested	1 × 10^-9 cc/min.
			Surface finish, interior	<5 µin Ra
Performance	Downstream cleanliness		Particles	<0.03 particles/liter (<1 particle/ft³) ≥0.01 µm
			Volatiles	Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)
	Removal rating		>0.0015 µm
Operating conditions	Maximum inlet pressure		6.9 MPa (68.9 bar, 1000 psi)
	Maximum forward/ reverse differential pressure		0.86 MPa (8.6 bar; 125 psid)
	Maximum operating temperature	Inert gases: 400°C (752°F) @ 35 bar (500 psig)
		Corrosive and reactive gases: 50°C (122°F) @ 35 bar (500 psig)

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Reference Materials Product Documentation

Published Jan 1, 2025 Data Sheet Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters

287.4 kB

Part Numbers

Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters Part Numbers

Part Number	Fitting Size and Type
SI2MSNFE05	1.125" C-seal micro filter, nickel
SI2MSSFE05	1.125" C-seal micro filter, stainless steel