Wafergard® SL 1.125" C-Seal Gas Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Gas panels
- Ultra-high purity gas lines
- High-temperature applications
- Dynamic pressure applications
- Stainless steel filters for inert, hydride and CO2 gases, nickel filters for inert and reactive gases
Specifications
Materials | Filter element: NF - Patented sintered nickel membrane | SF - Proprietary sintered stainless steel membrane | |
Housing base block | SEMI® F20 316L electropolished stainless steel | ||
Inlet/outlet connections | SurfaceLine 1.125" C-seal | ||
Removal rating | >0.0015 μm | ||
Surface finish interior | <5 μin Ra | ||
Helium leak rating | Qualified: 2 x 10-10 cc/sec | Tested: 1 x 10-9 cc/sec | |
Downstream cleanliness | Particles* | <0.03 particles/liter (<1 particle/ft3) ≥0.01 µm | |
Volatiles** | Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature) |
||
Particle retention | NF- Greater than 99.9999999% removal of all particles (referenced at the most penetrating particle size) SF- Greater than 99.9999% removal of all particles (referenced at the most penetrating particle size) |
||
Operating conditions | Maximum inlet pressure | 34.5 bar (500 psig) @ 20°C (68°F) | |
Maximum forward/ reverse differential pressure | 10 bar (150 psid) @ 23°C (73°F) NF-Micro and SF-Micro | ||
8 bar (115 psid) @ 23°C (73°F) NF-Mini and NF-Mini XL | |||
20 bar (300 psid) @ 23°C (73°F) | |||
Maximum operating temperature | Inert gases: 400°C (752°F) @ 35 bar (500 psig) | ||
Corrosive and reactive gases: 50°C (122°F) @ 35 bar (500 psig) | |||
*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD). **Volatile cleanliness qualified follwoing SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD). |
Successfully Opted for software Updates