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Wafergard® SL 1.125" W-Seal Gas Filter

Surface mount gas filters that reduce space on gas panels for standard in-line designs while reducing the investment and increasing variations.

  • SurfaceLine® integrated gas filter saves space on gas panels
  • All 316L stainless steel construction provides excellent chemical compatibility with most semiconductor process gases (not compatible with O3)
  • Special cleaning technology and high temperature baking achieve superior initial cleanliness and enable rapid gas delivery startup
  • High flow rate and low pressure drop characteristics are suitable for use with low vapor pressure gases
  • High particle removal efficiency helps improve yield
  • The SF Mini Plus filter has a compact, space-saving design with high flow rate characteristics that are equivalent to the SF Mini XL, making them ideal for use with both process and purge gases
  • Read More Read Less
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