Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
The GateKeeper® Gas Purification System (GPS) DZ series is the latest continuous service gas purifications system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution. It delivers purified CO2 gas to today’s scanner platforms, including immersion lithography tools. The ultra-small footprint and compact design requires minimal fab floor space and allows easy access to serviceable components.
•Purifies to ppt (parts-per-trillion) levels
•Low pressure drop resulting in no changes to inlet pressure required
•Low cost of ownership
•Ambient temperature purification
•Power failure will not damage purification system
•CE, CSEI (China) and SEMI® certified
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Interested in GateKeeper® DZ Series Gas Purification Systems?
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