Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
The GateKeeper® Gas Purification System (GPS) DZ series is the latest continuous service gas purifications system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution. It delivers purified CO2 gas to today’s scanner platforms, including immersion lithography tools. The ultra-small footprint and compact design requires minimal fab floor space and allows easy access to serviceable components.
•Purifies to ppt (parts-per-trillion) levels
•Low pressure drop resulting in no changes to inlet pressure required
•Low cost of ownership
•Ambient temperature purification
•Power failure will not damage purification system
•CE, CSEI (China) and SEMI® certified
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Interested in GateKeeper® DZ Series Gas Purification Systems?
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ApplicationsGateKeeper® DZ Series Gas Purification Systems Applications
•Wet etch and clean
•Applications that require purified CO2 gas
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