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Chacollet™ In-line Hydrocarbon Purifiers

Chacollet™ In-line Hydrocarbon Purifiers. Cost-effective hydrocarbon removal in lithography applications.

  • Removes purge-gas  impurities like CDA, N2, Ar and He
  • Excellent initial cleanliness
  • Maintains high retention in Hydrocarbons (>C6)
  • Can be used at ambient temperature without power or heat
  • Various models for various flow rate
  • Read More Read Less
Interested in Chacollet™ In-line Hydrocarbon Purifiers?

Contact your Entegris account manager or  contact us

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