GateKeeper® EX Series Gas Purification Systems
Contact your Entegris account manager or
- Photolithography
- FOUP Cleaning and purging
- Stocker cleaning and purging
- Other applications requiring XCDA purge gas
Specifications
Model | GPS20EX | GPS30EX | GPS50EX | GPS60EX |
Gases purified: | Inorganic | |||
Media type: | Inorganic | |||
Contaminants removed: | Moisture (H2O) | <100 ppt | ||
Carbon monoxide (CO) | <1 ppb | |||
Oxygen (O2) | <250 ppt | |||
CxHy (45-100 amu) | <5 ppt | |||
CxHy (<100 amu) | <1 ppt | |||
Refractory compounds | <1 ppt | |||
Operating pressure range: | 5.51-17.23 bar (80-250 psig) | |||
Pressure drop: | <15 psi @ 100 psig and max rated flow | |||
Maximum flow rate: | 20 Nm3/hr (311 SLM) | 30 Nm3/hr (466 SLM) | 50 Nm3/hr (776 SLM) | 60 Nm3/hr (932 SLM) |
Gas operating temperature: | 15°C–40°C (60°F–104°F) | |||
Outlet filtration (ISO Class 1) | <10 particles per m3 @ 0.1 μm | |||
<2 particles per m3 @ 0.2 μm | ||||
Leak rating: | 1 × 10-9 atm cc/sec |
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