GateKeeper® SX Series Gas Purification Systems
Contact your Entegris account manager or
- Metal Organic Chemical Vapor (MOCVD)
- Atomic Layer Deposition (ALD)
- Low Temperature Epitaxy (LTE)
- Other applications requiring ammonia gas
Specifications
Model | GPS90SX | GPS100SX | GPS120SX |
Gases purified | Ammonia (NH3) | ||
Media type | Inorganic | ||
Contaminants removed | Moisture (H2O): <1 ppb | ||
Carbon Dioxide (CO2): <1 ppb | |||
Oxygen (O2): <1 ppb | |||
Operating pressure range | 5.51 – 17.23 bar (80 – 250 psig) | ||
Pressure drop | <15 psi @ 100 psig and max rated flow | ||
Maximum flow rate | 90 N•m3/hr (1397 slm) | 100 N•m3/hr (1553 slm) | 120 N•m3/hr (1863 slm) |
Gas operating temperature | 15° – 40°C (60° – 104°F) | ||
Outlet filtration | ISO® Class 1 (<10 particles per m3 at 0.1 μm, <2 particles per m3 at 0.2 μm) | ||
Leak rating: | 1 × 10-9 atm cc/sec |
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