Luminousgard™ Gas Purifiers

These point-of-use, in-line gas purifiers effectively removes hydrocarbons, acid and base impurities, and particles in lithography applications.

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Applications Luminousgard™ Gas Purifiers Applications

Drawings

Performance Data

Product Specifications

Materials	Filter membrane	Nickel
	Housing	316L/304 stainless steel
Retention	Volatile hydrocarbons	≥ 99.9% (≥ C₆ hydrocarbons)
	Volatile acids	≥ 99.9% (e.g., SO₂, SO₃, NO₂, HCl, H₂S)
	Volatile bases	≥ 99.9% (e.g., NH₃, CH₃NH₂, [CH₃]₃N)
	Particles	≥ 99.9999999% removal of all particles ≥0.003 µm
Initial downstream cleanliness	Volatiles	≤ 1 ppb (≥C₆ number of volatile hydrocarbons @ 1 slpm*)
	Particles	≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm*
Connection	1/4" gasket seal (1/4" VCR^®compatible) male connector
Gas type	CDA, N₂, Ar, and He**
Operating conditions	Maximum flow rate	30 slpm*
	Design pressure	0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F)
	Maximum design forward differential pressure	0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F)
	Maximum design reverse differential pressure	0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F)
	Maximum operating temperature	50°C (122°F) – inert gases
	Approximate product weight	0.8 kg (1.76 lbs)
Lifetime	Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime.
*20°C, 101 kPa	**Contact Entegris for other compatible gas types.

Materials	Filter element	PTFE/PFA
	Housing	316L/304 stainless steel
Retention	Volatile hydrocarbons	≥ 99.9% (≥ C₆ hydrocarbons)
	Volatile acids	≥ 99.9% (e.g., SO₂, SO₃, NO₂, HCl, H₂S)
	Volatile bases	≥ 99.9% (e.g., NH₃, CH₃NH₂, [CH₃]₃N)
	Particles	≥ 99.9999999% removal of all particles ≥0.003 µm
Initial downstream cleanliness	Volatiles	≤ 1 ppb (≥C₆ number of volatile hydrocarbons @ 1 slpm*)
	Particles	≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm*
Connection	Inlet/outlet	1/2" gasket seal (1/2" VCRcompatible) male connector 1/2" compression seal (1/2" Swagelok^® tube fitting compatible
Gas type	CDA, N₂, Ar, and He**
Operating conditions	Maximum flow rate	200 slpm*
	Design pressure	0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F)
	Maximum design forward differential pressure	0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F)
	Maximum design reverse differential pressure	0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F)
	Maximum operating temperature	50°C (122°F) – inert gases
	Approximate product weight	3.21 kg (7.08 lbs)
Lifetime	Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime.
*20°C, 101 kPa	**Contact Entegris for other compatible gas types.

Materials	Filter element	PTFE/PFA
	Housing	316L/304 stainless steel
Retention	Volatile hydrocarbons	≥ 99.9% (≥ C₆ hydrocarbons)
	Volatile acids	≥ 99.9% (e.g., SO₂, SO₃, NO₂, HCl, H₂S)
	Volatile bases	≥ 99.9% (e.g., NH₃, CH₃NH₂, [CH₃]₃N)
	Particles	≥ 99.9999999% removal of all particles ≥0.003 µm
Initial downstream cleanliness	Volatiles	≤ 1 ppb (≥C₆ number of volatile hydrocarbons @ 1 slpm*)
	Particles	≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm*
Connection	Inlet/outlet	1/2" gasket seal (1/2" VCRcompatible) male connector 1/2" compression seal (1/2" Swagelok^® tube fitting compatible
Attachments	Swagekok tube fitting type	1/2" compression seal nut, front and back ferrules/2 sets (For all Luminousgard series)
Gas type	CDA, N₂, Ar, and He**
Operating conditions	Maximum flow rate	500 slpm*
	Design pressure	0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F)
	Maximum design forward differential pressure	0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F)
	Maximum design reverse differential pressure	0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F)
	Maximum operating temperature	50°C (122°F) – inert gases
	Approximate product weight	4.17 kg (9.19 lbs)
Lifetime	Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime.
*20°C, 101 kPa	**Contact Entegris for other compatible gas types.

Materials	Filter element	PTFE/PFA
	Housing	316L/304 stainless steel
Retention	Volatile hydrocarbons	≥ 99.9% (≥ C₆ hydrocarbons)
	Volatile acids	≥ 99.9% (e.g., SO₂, SO₃, NO₂, HCl, H₂S)
	Volatile bases	≥ 99.9% (e.g., NH₃, CH₃NH₂, [CH₃]₃N)
	Particles	≥ 99.9999999% removal of all particles ≥0.003 µm
Initial downstream cleanliness	Volatiles	≤ 1 ppb (≥C₆ number of volatile hydrocarbons @ 1 slpm*)
	Particles	≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm*
Connection	Inlet/outlet	1/2" compression seal (1/2" Swagelok tube fitting compatible
Attachments	1/2" compression seal nut, front and back ferrules/2 sets
Gas type	CDA, N₂, Ar, and He**
Operating conditions	Maximum flow rate	800 slpm*
	Design pressure	0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F)
	Maximum design forward differential pressure	0.49 MPa (4.9 bar, 71.05 psid) @ 25°C (77°F)
	Maximum design reverse differential pressure	0.34 MPa (3.4 bar, 49.3 psid) @ 25°C (77°F)
	Maximum operating temperature	50°C (122°F) – inert gases
	Approximate product weight	10.4 kg (23 lbs)
Lifetime	Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime.
*20°C, 101 kPa	**Contact Entegris for other compatible gas types.

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Reference Materials Product Documentation

Published Apr 15, 2019 Data Sheet Luminousgard™ Gas Purifiers

502.0 kB

Published Oct 10, 2019 Data Sheet Luminousgard™ガスピューリファイヤー

620.1 kB