Luminousgard™ Gas Purifiers
Contact your Entegris account manager or
- Clean dry air (CDA)
- Lens purge gas line for exposure equipment
- Purge gas line for laser generator
- Inert gas supply line
Specifications
Luminousgard Gas Purifier
Materials | Filter membrane | Nickel |
Housing | 316L/304 stainless steel | |
Retention | Volatile hydrocarbons | ≥ 99.9% (≥ C6 hydrocarbons) |
Volatile acids | ≥ 99.9% (e.g., SO2, SO3, NO2, HCl, H2S) | |
Volatile bases | ≥ 99.9% (e.g., NH3, CH3NH2, [CH3]3N) | |
Particles | ≥ 99.9999999% removal of all particles ≥0.003 µm | |
Initial downstream cleanliness | Volatiles | ≤ 1 ppb (≥C6 number of volatile hydrocarbons @ 1 slpm*) |
Particles | ≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm* | |
Connection | 1/4" gasket seal (1/4" VCR® compatible) male connector | |
Gas type | CDA, N2, Ar, and He** | |
Operating conditions | Maximum flow rate | 30 slpm* |
Design pressure | 0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F) | |
Maximum design forward differential pressure | 0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F) | |
Maximum design reverse differential pressure | 0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F) | |
Maximum operating temperature | 50°C (122°F) – inert gases | |
Approximate product weight | 0.8 kg (1.76 lbs) | |
Lifetime | Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime. | |
*20°C, 101 kPa | **Contact Entegris for other compatible gas types. |
Luminousgard 1000 Gas Purifier
Materials | Filter element | PTFE/PFA |
Housing | 316L/304 stainless steel | |
Retention | Volatile hydrocarbons | ≥ 99.9% (≥ C6 hydrocarbons) |
Volatile acids | ≥ 99.9% (e.g., SO2, SO3, NO2, HCl, H2S) | |
Volatile bases | ≥ 99.9% (e.g., NH3, CH3NH2, [CH3]3N) | |
Particles | ≥ 99.9999999% removal of all particles ≥0.003 µm | |
Initial downstream cleanliness | Volatiles | ≤ 1 ppb (≥C6 number of volatile hydrocarbons @ 1 slpm*) |
Particles | ≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm* | |
Connection | Inlet/outlet | 1/2" gasket seal (1/2" VCR compatible) male connector 1/2" compression seal (1/2" Swagelok® tube fitting compatible |
Gas type | CDA, N2, Ar, and He** | |
Operating conditions | Maximum flow rate | 200 slpm* |
Design pressure | 0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F) | |
Maximum design forward differential pressure | 0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F) | |
Maximum design reverse differential pressure | 0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F) | |
Maximum operating temperature | 50°C (122°F) – inert gases | |
Approximate product weight | 3.21 kg (7.08 lbs) | |
Lifetime | Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime. | |
*20°C, 101 kPa | **Contact Entegris for other compatible gas types. |
Luminousgard 2000 Gas Purifier
Materials | Filter element | PTFE/PFA |
Housing | 316L/304 stainless steel | |
Retention | Volatile hydrocarbons | ≥ 99.9% (≥ C6 hydrocarbons) |
Volatile acids | ≥ 99.9% (e.g., SO2, SO3, NO2, HCl, H2S) | |
Volatile bases | ≥ 99.9% (e.g., NH3, CH3NH2, [CH3]3N) | |
Particles | ≥ 99.9999999% removal of all particles ≥0.003 µm | |
Initial downstream cleanliness | Volatiles | ≤ 1 ppb (≥C6 number of volatile hydrocarbons @ 1 slpm*) |
Particles | ≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm* | |
Connection | Inlet/outlet | 1/2" gasket seal (1/2" VCR compatible) male connector 1/2" compression seal (1/2" Swagelok® tube fitting compatible |
Attachments | Swagekok tube fitting type | 1/2" compression seal nut, front and back ferrules/2 sets (For all Luminousgard series) |
Gas type | CDA, N2, Ar, and He** | |
Operating conditions | Maximum flow rate | 500 slpm* |
Design pressure | 0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F) | |
Maximum design forward differential pressure | 0.7 MPa (7 bar, 101.5 psid) @ 25°C (77°F) | |
Maximum design reverse differential pressure | 0.25 MPa (2.5 bar, 36.3 psid) @ 25°C (77°F) | |
Maximum operating temperature | 50°C (122°F) – inert gases | |
Approximate product weight | 4.17 kg (9.19 lbs) | |
Lifetime | Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime. | |
*20°C, 101 kPa | **Contact Entegris for other compatible gas types. |
Luminousgard 4000 Gas Purifier
Materials | Filter element | PTFE/PFA | |
Housing | 316L/304 stainless steel | ||
Retention | Volatile hydrocarbons | ≥ 99.9% (≥ C6 hydrocarbons) | |
Volatile acids | ≥ 99.9% (e.g., SO2, SO3, NO2, HCl, H2S) | ||
Volatile bases | ≥ 99.9% (e.g., NH3, CH3NH2, [CH3]3N) | ||
Particles | ≥ 99.9999999% removal of all particles ≥0.003 µm | ||
Initial downstream cleanliness | Volatiles | ≤ 1 ppb (≥C6 number of volatile hydrocarbons @ 1 slpm*) | |
Particles | ≤ 0.03 particles/L ≥ 0.01 µm at 30 slpm* | ||
Connection | Inlet/outlet | 1/2" compression seal (1/2" Swagelok tube fitting compatible | |
Attachments | 1/2" compression seal nut, front and back ferrules/2 sets | ||
Gas type | CDA, N2, Ar, and He** | ||
Operating conditions | Maximum flow rate | 800 slpm* | |
Design pressure | 0.98 MPa (9.8 bar, 142.1 psig) @ 25°C (77°F) | ||
Maximum design forward differential pressure | 0.49 MPa (4.9 bar, 71.05 psid) @ 25°C (77°F) | ||
Maximum design reverse differential pressure | 0.34 MPa (3.4 bar, 49.3 psid) @ 25°C (77°F) | ||
Maximum operating temperature | 50°C (122°F) – inert gases | ||
Approximate product weight | 10.4 kg (23 lbs) | ||
Lifetime | Please consult Entegris Account Managers for typical lifetime. Flow rate, duty cycle, type of impurity, and impurity concentration are needed to accurate determine lifetime. | ||
*20°C, 101 kPa | **Contact Entegris for other compatible gas types. |
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