-
Sign In
Sign In
Forgot Password?Please enter the email address for your account. A link to change your password will be emailed to you.
All Fields Required - Sign Out
- My Account
-
Quick Order Pad
Enter Part Numbers below to add them to your cart
Need to order more than 3 items?
Go to the Quick Order Page - Quick Order Pad
- Contact Us
- Cart
- Language
- Currency
MegaTorr® Catalyst and Adsorber Oxygen Gas Purifiers
Interested in MegaTorr® Catalyst and Adsorber Oxygen Gas Purifiers?
Contact your Entegris account manager or
Top of page
Reference Materials
Applications
- Purifies O2 gas for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS6-MGT15-O | 193 | 89 | 84 | < 600 |
PS6-MGT30-O | 193 | 89 | 84 | < 600 |
PS6-MGT60-O | 193 | 89 | 84 | < 600 |
PS6-MGT100-O | 193 | 132 | 135 | < 1,700 |
PS6-MGT200-O | 193 | 132 | 135 | < 1,700 |
PS6-MGT300-O | 214 | 148 | 196 | < 3,100 |
PS6-MGT400-O | 214 | 148 | 196 | < 3,100 |
PS6-MGT500-O | 237 | 191 | 237 | < 3,850 |
Other flow rates are available. Contact Entegris for details. |
Gas purified | O2 | ||
Impurities removed | H2O, CO, CO2, H2, CH4 < 1 ppb | ||
Maximum flow rates | Nm3/hr | slpm | |
PS6-MGT15-O | 15 | 250 | |
PS6-MGT30-O | 30 | 500 | |
PS6-MGT60-O | 60 | 1,000 | |
PS6-MGT100-O | 100 | 1,667 | |
PS6-MGT200-O | 200 | 3,333 | |
PS6-MGT300-O | 300 | 5,000 | |
PS6-MGT400-O | 400 | 6,667 | |
PS6-MGT500-O | 500 | 8,333 | |
*Other flow rates are available. Contact Entegris for details. | |||
For flow rates < 6 Nm3/hr (100 slpm) a GateKeeper HGU heated catalyst XCDA®, O2 (PS15) gas purifier can be used, followed by a GateKeeper GPU ambient temperature purifier with NX media.. | |||
Maximum pressure drop | < 0.7 bar (70 kPa) | ||
Note: | Purifiers are gas specific and should only be used for the gas indicated |
Standard Features | Optional Features |
|
|
Outdoor Enclosure Options (OPAL)
For outdoor installation, see our outdoor enclosure options
Successfully Opted for software Updates