MegaTorr® Catalyst and Adsorber Oxygen Gas Purifiers
These PS6 bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.
Uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications
Hydrocarbons (CH4), carbon monoxide (CO), and hydrogen (H2) react at elevated temperatures with oxygen (O2) in the oxidizing catalyst vessel to form carbon dioxide (CO2) and water (H2O), which are then removed in the ambient temperature adsorber vessel.
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
Adsorber regeneration is accomplished by back flushing purified O2 at an elevated temperature
Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm3/hr)
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ApplicationsMegaTorr® Catalyst and Adsorber Oxygen Gas Purifiers Applications
Purifies O2 gas for semiconductor applications
Other flow rates are available. Contact Entegris for details.
H2O, CO, CO2, H2, CH4 < 1 ppb
Maximum flow rates
*Other flow rates are available. Contact Entegris for details.