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MegaTorr® PS22 XCDA® Gas Purifiers

These PS22 automatically regenerable, bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

  • Uses ambient temperature adsorption processes designed specifically to provide ultra-high purity extreme clean dry air (XCDA®) for semiconductor applications
  • Optimized design provides sub-ppb performance in small footprints with flow rates up to 250,000 slpm (15,000 Nm3/hr)
  • Outlet impurity levels for water (H2O) and trace impurities including TOC's (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids, and NOx are reduced to below ppb levels
  • Read More Read Less
Interested in MegaTorr® PS22 XCDA® Gas Purifiers?

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