MegaTorr^® PS6 Oxygen Gas Purifiers

These PS6 catalyst and adsorber bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Uses dual catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications
Hydrocarbons (CH₄), carbon monoxide (CO), and hydrogen (H₂) react at elevated temperatures with oxygen (O₂) in the oxidizing catalyst vessel to form carbon dioxide (CO₂) and water (H₂O), which are then removed in the ambient temperature adsorber vessel.
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
Adsorber regeneration is accomplished by back flushing purified O₂ at an elevated temperature
Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)

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Applications MegaTorr^® PS6 Oxygen Gas Purifiers Applications

Model	H (cm)	W (cm)	D (cm)	Weight (kg)
PS6-MGT15-O	193	89	84	<600
PS6-MGT30-O	193	89	84	<600
PS6-MGT60-O	193	89	84	<600
PS6-MGT100-O	193	132	135	<1,700
PS6-MGT200-O	193	132	135	<1,700
PS6-MGT300-O	214	148	196	<3,100
PS6-MGT400-O	214	148	196	<3,100
PS6-MGT500-O	237	191	237	<3,850
Note:	Other flow rates are available. Contact Entegris for details.

Product Specifications

Gas purified	O₂
Impurities removed to <1 ppb	H₂O, CO, CO₂, H₂, CH₄
Maximum flow rates	Nm³/hr	slpm
PS6-MGT15-O	15	250
PS6-MGT30-O	30	500
PS6-MGT60-O	60	1,000
PS6-MGT100-O	100	1,667
PS6-MGT200-O	200	3,333
PS6-MGT300-O	300	5,000
PS6-MGT400-O	400	6,667
PS6-MGT500-O	500	8,333
*Other flow rates are available. Contact Entegris for details.
For flow rates <6 Nm³/hr (100 slpm) a GateKeeper HGU heated catalyst XCDA^®, O₂ (PS15) gas purifier can be used, followed by a GateKeeper GPU ambient temperature purifier with NX media.
Maximum pressure drop	<0.7 bar (70 kPa)
Note: Purifiers are gas specific and should only be used for the gas indicated.

Standard Features	Optional Features
Automated microprocessor controller HMI (Human Machine Interface) System alarms Gas-to-gas heat exchanger Electric gas preheaters Closed-loop temperature controls All-metal cabinet with doors High-temperature hardware interlock Over-pressurization safety relief system	Inlet and outlet isolation valves Mass flowmeter with 4-20 mA output Inlet and outlet pressure transducers Instrument air management system Air cooled heat exchanger Auto or manual bypass Ultrafine 0.003 µm particle filter Separate control power MODBUS data commuication port

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Reference Materials Product Documentation

Published Aug 3, 2021 Data Sheet MegaTorr® PS6 Oxygen Gas Purifiers

189.0 kB

Published Aug 3, 2021 Data Sheet MegaTorr® PS6 Oxygen Gas Purifiers - A4

189.0 kB

Published Sep 4, 2019 Brochure Gas Purification Solutions

586.1 kB