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- Industry: Semiconductor, Chemical Manufacturing
- Process: Facilities
- Chemical: Aggressive Acids and Bases, Solvents
- Installation Point: Bulk
Specifications
| Materials: | Housing head: Equivalent 316L stainless steel |
| Housing bowl, plug: 316L stainless steel | |
| Spring: 316 stainless steel | |
| TC clamp: Equivalent 304 stainless steel | |
| O-ring: EPDM (G165) | |
| Surface finish casting type (interior/exterior): | Head: Electropolished (o-ring seal parts are machined) |
| Bowl: #400 buffering/hairline treated | |
| Surface finish Machined type (interior/exterior): | Head, bowl: #400 buffering/hairline treated |
| Connections: | Inlet/outlet: 1 1/2" PTF (Rc), 40A or 50A JIS 20K FF, 40A JIS 30K FF |
| Vent/drain: PFT (Rc) 1/2 | |
| Operating conditions: | Maximum operating temperature: 1.5 MPa @80°C (176°F) (static) |
| 2.5 MPa @ 60°C (140°F) (static) YY34SHD4S part only | |
| Cartridge configuration: | 334 o-ring |
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