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Astera™ Liquid Filter

High-purity, dilute acid and base defect reduction solution that improves wafer yield performance.

  • Advanced PAS membrane ensures chemical purity, providing lower baseline WPA
  • DI water prewet packaging enables fast flush up, which reduces downtime and allows faster release to production
  • High flow, 10 nm membrane enables fast flush up and facility chemical throughput, which reduces downtime and allows faster release to production
  • Native, unmodified membrane provides advanced particle retention at all pH levels, reducing inventory with a single product for multiple dilute applications
  • Read More Read Less
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