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Best-in-class linear filtration technology
Brand Name
  • FlowPlane™
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
Installation Point
  • Point of Tool
Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries
Brand Name
  • Torrento®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Resist Stripper
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
Installation Point
  • Point of Tool
  • Point of Dispense
  • Bulk
Best-in-class, leading-edge filtration of solvents and BEOL chemistries
Brand Name
  • Torrento®
Chemistry
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
Installation Point
  • Point of Tool
  • Point of Dispense
  • Bulk
Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries
Brand Name
  • QuickChange®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Point of Dispense
  • Bulk
Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications
Brand Name
  • Fluorogard®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Solvent
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Advanced, ultra-clean filtration of low-temperature, dilute acids and bases.
Brand Name
  • Guardian™
Chemistry
  • Dilute Acids
  • Dilute Bases
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Best in class, low-temperature dilute acid filter
Brand Name
  • Intercept®
Chemistry
  • Dilute Acids
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Best-in-class, ultra-clean, point-of-use photochemical filter, delivering superior flow rate performance and reduced microbubble formation capabilities.
Brand Name
  • Impact®
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
Installation Point
  • Point of Tool
Best-in-class, ultra-clean, bulk photochemical filter.
Brand Name
  • Microgard™
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-28 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Advanced clean, point-of-use filter designed for NTD and RRC solvents.
Brand Name
  • Eximor™
Chemistry
  • Solvent
Feature Size (Layer)
  • 14-22 nm
Installation Point
  • Point of Tool
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