Etchgard™ HP and HPX Filters
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Reference Materials
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Applications
- Ideally suited for HF and BOE recirculation bath processes
- Point-of-tool processes
Specifications
| FILTER TYPE | HP | HPX | |
| Materials of construction | Membrane | Hydrophilic ultra-high molecular weight polyethylene (UPE) | |
| Supports, sleeve, core, and end caps | Non-woven high-density polyethylene (HDPE) | ||
| Code 0 double 2-222 O-rings | Encapsulated fluoropolymer (E-FKM) or Kalrez® 4079 and 6375 | ||
| Chem-Line I disposable outer shell | N/A | PFA | |
| Retention rating | 0.1 µm, 0.05 µm | ||
| Membrane surface area | - 10": 0.85 m2 | 4": 0.5 m2 10": 1.1 m2 20": 2.2 m2 | |
| Operating conditions | Maximum forward differential pressure: | 0.35 MPa (2.5 bar; 50 psid) @ 25°C (77°F) | |
| Maximum reverse differential pressure: | 0.35 MPa (2.5 bar; 50 psid) @ 25°C (77°F) | ||
| Maximum operating temperature: | 60°C (140°F) at the above conditions | ||
Successfully Opted for software Updates
Part Numbers
| Part Number | Form Factor | Retention Rating | Length | O-ring | Connection | Chemlock® Key |
|---|---|---|---|---|---|---|
| CPUV01P01 | Cartridge | 0.1 µm | 10" | E-FKM (HPX) | Code 0 | No |
| CPUV01P01K | Cartridge | 0.1 µm | 10" | E-FKM (HPX) | Code 0 | Yes |
| CPUV01PK1 | Cartridge | 0.1 µm | 10" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUV01PK1K | Cartridge | 0.1 µm | 10" | Kalrez® 4079 (HPX) | Code 0 | Yes |
| CPUV01PLK | Cartridge | 0.1 µm | 10" | Kalrez® 4079 (HP) | Code 0 | No |
| CPUV01PLKK | Cartridge | 0.1 µm | 10" | Kalrez® 4079 (HP) | Code 0 | Yes |
| CPUV01PLT | Cartridge | 0.1 µm | 10" | E-FKM (HP) | Code 0 | No |
| CPUV01PLTK | Cartridge | 0.1 µm | 10" | E-FKM (HP) | Code 0 | Yes |
| CPUV01PR1 | Cartridge | 0.1 µm | 10" | Kalrez® 6375 (HPX) | Code 0 | No |
| CPUV01PR1K | Cartridge | 0.1 µm | 10" | Kalrez® 6375 (HPX) | Code 0 | Yes |
| CPUV02P01 | Cartridge | 0.1 µm | 20" | E-FKM (HPX) | Code 0 | No |
| CPUV02PK1 | Cartridge | 0.1 µm | 20" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUV02PLK | Cartridge | 0.1 µm | 20" | Kalrez® 4079 (HP) | Code 0 | No |
| CPUV02PLT | Cartridge | 0.1 µm | 20" | E-FKM (HP) | Code 0 | No |
| CPUV02PR1 | Cartridge | 0.1 µm | 20" | Kalrez® 6375 (HPX) | Code 0 | No |
| CPUV0SP01 | Cartridge | 0.1 µm | 4" | E-FKM (HPX) | Code 0 | No |
| CPUV0SPK1 | Cartridge | 0.1 µm | 4" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUV0SPR1 | Cartridge | 0.1 µm | 4" | Kalrez® 6375 (HPX) | Code 0 | No |
| CPUZ01P01 | Cartridge | 0.05 µm | 10" | E-FKM (HPX) | Code 0 | No |
| CPUZ01P01K | Cartridge | 0.05 µm | 10" | E-FKM (HPX) | Code 0 | Yes |
| CPUZ01PK1 | Cartridge | 0.05 µm | 10" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUZ01PK1K | Cartridge | 0.05 µm | 10" | Kalrez® 4079 (HPX) | Code 0 | Yes |
| CPUZ01PLK | Cartridge | 0.05 µm | 10" | Kalrez® 4079 (HP) | Code 0 | No |
| CPUZ01PLKK | Cartridge | 0.05 µm | 10" | Kalrez® 4079 (HP) | Code 0 | Yes |
| CPUZ01PLT | Cartridge | 0.05 µm | 10" | E-FKM (HP) | Code 0 | No |
| CPUZ01PLTK | Cartridge | 0.05 µm | 10" | E-FKM (HP) | Code 0 | Yes |
| CPUZ01PR1 | Cartridge | 0.05 µm | 10" | Kalrez® 6375 (HPX) | Code 0 | No |
| CPUZ01PR1K | Cartridge | 0.05 µm | 10" | Kalrez® 6375 (HPX) | Code 0 | Yes |
| CPUZ02P01 | Cartridge | 0.05 µm | 20" | E-FKM (HPX) | Code 0 | No |
| CPUZ02PK1 | Cartridge | 0.05 µm | 20" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUZ02PLK | Cartridge | 0.05 µm | 20" | Kalrez® 4079 (HP) | Code 0 | No |
| CPUZ02PLT | Cartridge | 0.05 µm | 20" | E-FKM (HP) | Code 0 | No |
| CPUZ02PR1 | Cartridge | 0.05 µm | 20" | Kalrez® 6375 (HPX) | Code 0 | No |
| CPUZ0SP01 | Cartridge | 0.05 µm | 4" | E-FKM (HPX) | Code 0 | No |
| CPUZ0SPK1 | Cartridge | 0.05 µm | 4" | Kalrez® 4079 (HPX) | Code 0 | No |
| CPUZ0SPR1 | Cartridge | 0.05 µm | 4" | Kalrez® 6375 (HPX) | Code 0 | No |
| EPFVHPXTH | Chem-Line™ I Large Disposable | 0.1 µm | 10" | N/A | 3/4" T Super 300 Type Pillar® | N/A |
| EPFVHPXTW | Chem-Line™ I Large Disposable | 0.1 µm | 10" | N/A | T-tube, 3/4" inlet/outlet, 1/2" vent/drain, Flowell™ 20 Fittings | N/A |
| EPFZHPXTH | Chem-Line™ I Large Disposable | 0.05 µm | 10" | N/A | 3/4" T Super 300 Type Pillar® | N/A |