FlowPlane™ Linear Filtration Technology
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- Industry: Semiconductor
- Process: Wet Etch and Clean
- Chemistry: Aggressive Acids, Aggressive Bases and Solvents
- Installation Point: Point-of-Tool
Specifications
Materials |
Membrane | Prewet, nondewetting PTFE |
Supports, shell | PFA | |
Retention rating | 7 nm, 2 nm, and <1 nm | |
Surface area | 0.46 m² (4.00") | 0.75 m² (6.00") |
Maximum Operating Conditions |
Maximum operating pressure | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) |
0.10 MPa (1.0 bar, 14 psi) @ 200ºC (392°F) | ||
Maximum operating temperature | 200°C (392°F) | |
Clean | UCM-10: Metallic extractables, TOC, Cl, F, NVR | |
UCM-5SE: Metallic extractables, NVR | ||
Note: All FlowPlane product configurations are PFOA free. |
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