Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Industry: Semiconductor, Flat Panel Display, Data Storage, LED
Process: Wet Etch and Clean, Substrate - Ni-P Plating, Substrate - IPA, Media - IPA, Media - Lube, Chemical, Bulk Chemical Delivery
Chemistry: Aggressive Acids, Aggressive Bases
Installation Point: Point of Tool, Bulk, Facilities
NXT Cartridge (Dry)
NXT Cartridge (Prewet²)
Supports, core, sleeve
0.05, 0.1, 0.2, 0.5, 1.0, 5, 10 µm, 15, 30 nm
0.05, 0.1, 0.2, 0.5, 1.0, 5, 10 µm
Membrane Surface Area
.36m² (3.88 ft²)
0.9m² (9.68 ft²)
1.8m² (19.38 ft²)
2.7m² (29.06 ft²)
Testing conducted for 23 metals
Maximum operating pressure
0.58 MPa (5.8 bar, 84 psi @ 25°C [77°F])
Maximum forward differential pressure
0.44 MPa (4.4 bar, 64 psi @ 25°C [77°F])
0.05 MPa (0.5 bar, 7.5 psi @ 180°C [356°F])
Maximum reverse pressure
0.34 MPa (3.4 bar, 50 psi @ 25°C [77°F])
Operating temperature 180°C (356°F)
¹Retention ratings of 15 nm and 30 nm apply to solvent filtration (dry configuration only) ²The prewet option ships 1% H₂O₂ wet. Contact Entegris for proper use and handling. Note: Fluorogard® NX filters are PFOA free. Shelf life (prewet option) is one year.