Fluorogard® NX Filter
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- Medium- to high-flow chemical applications in both semiconductor and display market applications
- Wet etch and clean (WEC) applications/one pass and recirculation
- Bulk chemical manufacturing
- Bulk chemical delivery systems (BCDS)
- Aggressive aqueous chemistries
- Advanced solvents
Note: Fluorogard NX filters are not recommended for high-outgassing solutions like SPM, SC1, and SC2. Entegris recommends QuickChange® NX filters for these applications.
Specifications
NXT cartridge filters |
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Cartridge length | A (overall) | B (control) | C (shoulder) |
4" | 132.3 mm (5.21") | 115.0 mm (4.53") | 113.0 mm (4.45") |
10" | 262.3 mm (10.33") | 245.0 mm (9.65") | 243.0 mm (9.57") |
20" | 498.3 mm (19.62") | 481.0 mm (18.94") | 479.0 mm (18.86") |
30" | 738.0 mm (29.06") | 721.0 mm (28.39") | 719.0 mm (28.31") |
NXE cartridge filters |
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Cartridge length | A (overall) | B (control) | C (shoulder) |
10" | 244.0 mm (9.61") | 227.0 mm (8.94") | 225.0 mm (8.86") |
20" | 471.0 mm (18.54") | 454.0 mm (17.87") | 452.0 mm (17.80") |
30" | 699.5 mm (27.54") | 682.0 mm (26.85") | 681.0 mm (26.81") |
NXT cartridge | NXE cartridge | ||
Materials | Membrane | Hydrophobic PTFE | |
Supports, core, sleeve, end caps, Chemlock® key | PFA | ||
O-ring options | E-FKM, E-ETP, Kalrez® | ||
Retention ratings | 0.05, 0.1, 0.2, 0.5, 1.0, 5, 10 µm, 15, 30 nm | 0.05, 0.1, 0.2, 0.5 µm, 15, 30 nm | |
Membrane surface area | 4": 0.36 m2 (3.88 ft2) | 10": 2.1 m² (22.6 ft²) | |
10": 0.9 m2 (9.68 ft2) | 20" 4.2 m² (45.21 ft²) | ||
20": 1.8 m2 (19.38 ft2) | 30" 6.3 m2 (67.81 ft2) | ||
30": 2.7 m2 (29.06 ft2) | |||
Metallic extractables | Testing conducted for 23 metals | ||
Maximum operating conditions | Operating pressure | 0.58 MPa (5.8 bar, 84 psi @ 25°C [77°F]) | |
Forward differential pressure | 0.44 MPa (4.4 bar, 64 psi @ 25°C [77°F]) | ||
0.05 MPa (0.5 bar, 7.5 psi @ 180°C [356°F]) | |||
Reverse pressure | 0.34 MPa (3.4 bar, 50 psi @ 25°C [77°F]) | ||
Operating temperature | 180°C (356°F) | ||
Note: The prewet option ships 0.9% H2O2 wet. Contact Entegris for proper use and handling. Fluorogard NX filters are PFOA free. Shelf life (prewet option) is one year. |
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