Fluorogard® RS Filter
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Applications
- Industry: Semiconductor
- Process: Wet Etch and Clean
- Chemistry: Resist Stripping
- Installation Point: Point of Tool
Specifications
| RS-T | RS-M | ||
|---|---|---|---|
| Materials: | Filtration media | Optimized PTFE membrane | PTFE pre-filtration media and optimized PTFE Membrane |
| Disposable shell | PFA | ||
| Supports, core, sleeve and end caps | PFA | ||
| Cartridge O-ring | TEE (fluoropolymer encapsulated ethylene-propylene rubber) | ||
| Retention rating: | 0.2µm, 0.1 µm and 0.05µm | ||
| Maximum operating conditions: | Maximum inlet pressure | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | |
| Maximum forward differential pressure | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) 0.05MPa (0.5 bar, 7.5 psi) @ 180°C (302°F) | ||
| Maximum reverse pressure | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | ||
| Maximum operating temperature | 180°C (356°F) | ||
| Surface Area: | 13,000 cm² (14 ft²) | 6,500 cm² (7 ft²) | |
P-RS specs (RS filter family pre-filter)
| Materials: | Filtration media | PTFE non-woven membrane |
| Supports, sleeve, end caps, core | PFA | |
| Cartridge O-ring | TEE (fluoropolymer encapsulated ethylene-propylene rubber) | |
| Rentention rating: | 40 µm | |
| Maximum operating conditions: | Maximum inlet pressure | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) |
| Maximum forward differential pressure | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) 0.05MPa (0.5 bar, 7.5 psi) @ 180°C (302°F) | |
| Maximum reverse pressure | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | |
| Maximum operating temperature | 180°C (356°F) | |
| Surface Area: | 14,000 cm² (15.1 ft²) |
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Part Numbers
| Part Number | Form Factor | Typical Flow Rate | Chemlock® Key | Prewet | O-ring | Connection | Length | Retention Rating | |
|---|---|---|---|---|---|---|---|---|---|
| CDPG01PTH | Large Disposable | Low Flux | N/A | No | N/A | 3/4" inlet/outlet, T-tube 1/2" vent/drain, Super Type Pillar® fitting | 10" | 0.2 µm | |
| CDTZ01PTHN | Chem-Line™ I Large Disposable | Mid flux | No | No | N/A | 3/4" inlet/outlet, T-tube 1/2" vent/drain, Super Type Pillar® fitting | 10" | 0.05 µm | |
| CTTV01PK1 | Cartridge | Mid flux | Yes | No | E-FKM | Code 0 | N/A | 10" | 0.1 µm |
| CTTZ01P01KN | Cartridge | Mid flux | Yes | No | E-FKM | Code 0 | N/A | 10" | 0.05 µm |
| CTTZ01P01N | Cartridge | Mid flux | No | No | E-FKM | Code 0 | N/A | 10" | 0.05 µm |