Guardian™ DEV/HPM Filter
Specify Your Part
Part Number:
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact Us
Request a Quote
Quote Requested
Thank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Top of page
Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Industry: Semiconductor, Data Storage
- Process: Wet Etch and Clean
- Chemistry: Dilute Acids, Dilute Bases
- Installation Point: Point of Tool
Specifications
| Models: | Guardian DEV Cartridge, Guardian Plus HPM Cartridge, Guardian DEV HPX Disposable | |
| Materials: | Membrane: | Patented hydrophilic ultra-high molecular weight polyethylene (UPE) |
| Support, sleeve, core, end caps: | High-density polyethelene (HDPE) | |
| Code 0 Double 2-222 o-ring: | DEV; EP, E-FKM, Kalrez® 4079, Plus HPM; E-FKM, FER, DEV HPX; N/A | |
| Chem-Line™ disposable outer shell: | DEV; N/A, Plus HPM; N/A, DEV HPX; Polypropylene | |
| Rentention rating: | 0.05, 0.1 µm | |
| Membrane surface area: | DEV: | 0.85m², 20": 1.7m², 30": 2.55m² |
| Plus HPM: | 10"; 1.9m², 20"; 3.8m², 30"; 5.7m² | |
| DEV HPX: | 10"; 1.1. m², 20"; N/A, 30"; N/A | |
| Maximum operating conditions: | Maximum forward differential pressure: | DEV: 0.35 MPa (3.5 bar; 50 psid) @ 25°C (77°F) Plus HPM; 0.24 MPa (2.4 bar; 35 psid) @ 25°C (77°F) DEV HPX; 0.35 MPa (3.5 bar; 50 psid) @ 20°C (68°F) |
| Maximum reverse differential pressure: | DEV: 0.25 MPa (2.5 bar; 35 psid) @ 25°C (77°F) Plus HPM; 0.24 MPa (2.4 bar; 35 psid) @ 25°C (77°F) DEV HPX; 0.25 MPa (2.5 bar; 35 psid) @ 20°C (68°F) |
|
| Maximum inlet pressure: | DEV: N/A Plus HPM; 0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F) 0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F) DEV HPX: 0.69 MPa (6.9 bar; 100 psid) @ 20°C (68°F) |
|
| Maximum operating temperature: | 60°C (140°F) | |
| Compatibility: | Recommended for use in ammonium hydroxide, TMAH and low-temperature organic resist strippers. Not recommended in chemistries with peroxide or aromatic hydrocarbons. |
|
Successfully Opted for software Updates
Published Oct 30, 2018
Data Sheet
Guardian™ DEV and Guardian Plus HPM Cartridge and Disposable Filters
585.6 kB
Part Numbers
| Part Number | Form Factor | Typical Flow Rate | Chemlock® Key | O-ring | Connection | Length | Retention Rating |
|---|---|---|---|---|---|---|---|
| CHUV01PLE | Cartridge | Low Flux | No | EPR | Code 0, double 2-222 | 10" | 0.1 µm |
| CHUV01PLEK | Cartridge | Low Flux | Yes | EPR | Code 0, double 2-222 | 10" | 0.1 µm |
| CHUV01PLKK | Cartridge | Low Flux | Yes | Kalrez® 4079 | Code 0, double 2-222 | 10" | 0.1 µm |
| CHUV01PLT | Cartridge | Low Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| CHUV01PLTK | Cartridge | Low Flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| CHUV02PLE | Cartridge | Mid-High Flux | No | EPR | Code 0, double 2-222 | 20" | 0.1 µm |
| CHUV02PLT | Cartridge | Mid-High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.1 µm |
| CHUV03PLE | Cartridge | Mid-High Flux | No | EPR | Code 0, double 2-222 | 30" | 0.1 µm |
| CHUZ01PLE | Cartridge | Low Flux | No | EPR | Code 0, double 2-222 | 10" | 0.05 µm |
| CHUZ01PLEK | Cartridge | Low Flux | Yes | EPR | Code 0, double 2-222 | 10" | 0.05 µm |
| CHUZ01PLK | Cartridge | Low Flux | No | Kalrez® 4079 | Code 0, double 2-222 | 10" | 0.05 µm |
| CHUZ01PLT | Cartridge | Low Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| CHUZ01PLTK | Cartridge | Low Flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| CHUZ02PLE | Cartridge | Mid-High Flux | No | EPR | Code 0, double 2-222 | 20" | 0.05 µm |
| CHUZ02PLT | Cartridge | Mid-High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.05 µm |
| CHUZ03PLE | Cartridge | Mid-High Flux | No | EPR | Code 0, double 2-222 | 30" | 0.05 µm |
| GDDVDEV0F | Chem-Line™ II Large Disposable | Mid flux | N/A | N/A | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | 10" | 0.1 µm |
| GDDZDEV0F | Chem-Line™ II Large Disposable | Mid flux | N/A | N/A | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | 10" | 0.05 µm |
| GDDZDEV2F | Chem-Line™ II Large Disposable | Mid flux | N/A | N/A | 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | 10" | 0.05 µm |
| GDPGHPXTH | Chem-Line™ I Large Disposable | Mid flux | N/A | N/A | Code 0, double 2-222 | 10" | 0.2 µm |
| GHPG01P01 | Cartridge | Mid flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.2 µm |
| GHPG01PLT | Cartridge | Low Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.2 µm |
| GHPG02P01 | Cartridge | High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.2 µm |
| GHPG02PLT | Cartridge | Mid-High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.2 µm |
| GHPG0SP01 | Cartridge | Low Flux | No | E-FKM | Code 0, double 2-222 | 4" | 0.2 µm |
| GHPV01P01 | Cartridge | Mid flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV01P01K | Cartridge | Mid flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV01PK1 | Cartridge | Mid flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV01PK1K | Cartridge | Mid flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV01PLT | Cartridge | Low Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV01PLTK | Cartridge | Low Flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GHPV02P01 | Cartridge | High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.1 µm |
| GHPV02P01K | Cartridge | High Flux | Yes | E-FKM | Code 0, double 2-222 | 20" | 0.1 µm |
| GHPV02PLTK | Cartridge | Mid-High Flux | Yes | E-FKM | Code 0, double 2-222 | 20" | 0.1 µm |
| GHPZ01P01 | Cartridge | Mid flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| GHPZ01P01K | Cartridge | Mid flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| GHPZ01PK1 | Cartridge | Mid flux | No | Kalrez® 4079 | Code 0, double 2-222 | 10" | 0.05 µm |
| GHPZ01PK1K | Cartridge | Mid flux | Yes | Kalrez® 4079 | Code 0, double 2-222 | 10" | 0.05 µm |
| GHPZ01PLT | Cartridge | Low Flux | No | E-FKM | — | 10" | 0.05 µm |
| GHPZ01PLTK | Cartridge | Low Flux | Yes | E-FKM | — | 10" | 0.05 µm |
| GHPZ02P01 | Cartridge | High Flux | No | E-FKM | — | 20" | 0.05 µm |
| GHPZ02PLT | Cartridge | Mid-High Flux | No | E-FKM | — | 20" | 0.05 µm |
| GHPZ02PLTK | Cartridge | Mid-High Flux | Yes | E-FKM | — | 20" | 0.05 µm |
| GUCV01M01 | Cartridge | High Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GUCV01M01K | Cartridge | High Flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.1 µm |
| GUCV01MT1 | Cartridge | High Flux | No | FER | Code 0, double 2-222 | 10" | 0.1 µm |
| GUCV01MT1K | Cartridge | High Flux | Yes | FER | Code 0, double 2-222 | 10" | 0.1 µm |
| GUCV02M01K | Cartridge | High Flux | Yes | E-FKM | Code 0, double 2-222 | 20" | 0.1 µm |
| GUCZ01M01 | Cartridge | High Flux | No | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| GUCZ01M01K | Cartridge | High Flux | Yes | E-FKM | Code 0, double 2-222 | 10" | 0.05 µm |
| GUCZ01MR1K | Cartridge | High Flux | Yes | Kalrez® 6375 | Code 0, double 2-222 | 10" | 0.05 µm |
| GUCZ01MT1 | Cartridge | High Flux | No | FER | Code 0, double 2-222 | 10" | 0.05 µm |
| GUCZ01MT1K | Cartridge | High Flux | Yes | FER | Code 0, double 2-222 | 10" | 0.05 µm |
| GUCZ02M01 | Cartridge | High Flux | No | E-FKM | Code 0, double 2-222 | 20" | 0.05 µm |
| GUCZ02M01K | Cartridge | High Flux | Yes | E-FKM | Code 0, double 2-222 | 20" | 0.05 µm |
| GUCZ02MT1 | Cartridge | High Flux | No | FER | Code 0, double 2-222 | 20" | 0.05 µm |
| GUCZ02MT1K | Cartridge | High Flux | Yes | FER | Code 0, double 2-222 | 20" | 0.05 µm |