Guardian™ PS Filter
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Guardian PS UC liquid filters are ideal in point-of-tool applications involving:
- Dilute acid process chemicals such as BOE and DHF
- Dilute base process chemicals such as NH4OH and TMAH
- DI water
- Low-temperature processes (<70°C)
Specifications
Materials | Membrane | Nondewetting polysulfone (PS) | |
Supports, sleeve, core, end caps | High-density polyethylene (HDPE) | ||
Code 0 double 2-222 O-rings | Encapsulated fluoropolymer (E-FKM) or Kalrez® 6375 | ||
Chem-Line™ II disposable outer shell | Polypropylene (PP) and PFA | ||
Chem-Line™ I disposable outer shell | PFA | ||
Retention rating | 1 nm, 5 nm | ||
Membrane surface area | 10” 1 nm: 1.7 m2 (18.30 ft2) 20" 1 nm: 3.4 m2 (36.60 ft2) |
10" 5 nm: 1.6 m2 (17.22 ft2) 20" 5 nm: 3.2 m2 (34.44 ft2) |
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Maximum operating conditions | Maximum forward differential pressure: 0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F) |
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Maximum reverse pressure: 0.21 MPa (2.1 bar; 30 psi) @ 25°C (77°F) |
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Maximum operating pressure: 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) |
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Maximum operating temperature: 70°C (158°F) @ 23 psi |
Note: Filters are prewet – enclosed in a bag filled with DI water and 0.9% H2O2.
Successfully Opted for software Updates
Part Number | Retention Rating | Length | Configuration | Shell Type | Connection | Chemlock® Key | O-ring |
---|---|---|---|---|---|---|---|
GS2EM1FM01FT | 1 nm | 10" | In-line | PP | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GS2EM1FM31FT | 1 nm | 10" | In-line | PP | 3/8" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GS2FM1EM01FT | 5 nm | 10" | In-line | PP | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GS2FM1EM21FT | 5 nm | 10" | In-line | PP | 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GS2FM1EM31FT | 5 nm | 10" | In-line | PP | 3/8" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GS2FM1EM41FT | 5 nm | 10" | In-line | PP | 1" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GSCEM1F000T | 1 nm | 10" | In-line | N/A | Code 0 | No | E-FKM |
GSCEM1F00KT | 1 nm | 10" | In-line | N/A | Code 0 | Yes | E-FKM |
GSCEM1F0RKT | 1 nm | 10" | In-line | N/A | Code 0 | Yes | Kalrez® 6375 |
GSCEM2F00KT | 1 nm | 20" | In-line | N/A | Code 0 | Yes | E-FKM |
GSCEM2F0RKT | 1 nm | 20" | In-line | N/A | Code 0 | Yes | Kalrez® 6375 |
GSCFM1E000T | 5 nm | 10" | In-line | N/A | Code 0 | No | E-FKM |
GSCFM1E00KT | 5 nm | 10" | In-line | N/A | Code 0 | Yes | E-FKM |
GSCFM1E0RKT | 5 nm | 10" | In-line | N/A | Code 0 | Yes | Kalrez® 6375 |
GSCFM2E00KT | 5 nm | 20" | In-line | N/A | Code 0 | Yes | E-FKM |
GSCFM2E0RKT | 5 nm | 20" | In-line | N/A | Code 0 | Yes | Kalrez® 6375 |
GSDEM1F902ST | 1 nm | 10" | T-line | PFA | 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSDEM1F942ST | 1 nm | 10" | T-line | PFA | 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSDEM1FT02HT | 1 nm | 10" | T-line | PFA | 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar® Fitting | No | N/A |
GSDFM1E902ST | 5 nm | 10" | T-line | PFA | 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSDFM1E942ST | 5 nm | 10" | T-line | PFA | 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSDFM1ET02HT | 5 nm | 10" | T-line | PFA | 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar® Fitting | No | N/A |
GSLEM1F102FT | 1 nm | 10" | In-line | PFA | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GSLEM1FM01ST | 1 nm | 10" | In-line | PFA | 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSLFM1E102FT | 5 nm | 10" | In-line | PFA | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GSLFM1EM01ST | 5 nm | 10" | In-line | PFA | 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | No | N/A |
GSLFM1EM41FT | 5 nm | 10" | In-line | PFA | 1" inlet/outlet, 1/4" vent/drain, Flaretek® compatible fitting | No | N/A |
GSLFM1EM41ST | 5 nm | 10" | In-line | PFA | 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | No | N/A |