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Applications
- Industry: Semiconductor (Wet Etch and Clean, Bulk Chemical Delivery)
- Chemistry: Dilute Acids
- Installation Point: Point-of-Tool
Specifications
| HP | HPX | HPM | HSM | |||
|---|---|---|---|---|---|---|
| Materials: | Membrane: | Hydrophilic ultra-high molecular weight polyethylene (UPE) | Hydrophilic polysulfone (PS) | |||
| Supports, sleeve, end caps, core | Nonwoven high-density polyethylene (HDPE) | |||||
| Code 0 double 2-222 o-rings | Encapsulated fluoropolymer (E-FKM) or Kalrez® 4079 and 6375 | |||||
| Chem-Line™ II disposables’ outer shell | NA | Polypropylene | Polypropylene | Polypropylene | ||
| Chem-Line™ I disposables’ outer shell | NA | NA | PFA | PFA | ||
| Retention rating: | 0.2, 0.1, 0.05 µm | 0.2, 0.1, 0.05 µm | 0.05, 0.03 µm, 10 nm | 20, 7 nm | ||
| Membrane surface area: | 10": 0.85 m² | 4": 0.5 m² 10": 1.1 m² 20": 2.2 m² |
10": 1.9 m² 20": 3.8 m² 30": 5.7 m² |
4": 0.6 m² 10": 1.2 m² 20": 2.4 m² |
||
| Maximum operating conditions: | Maximum forward differential pressure | 0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F) | ||||
| Maximum reverse pressure | 0.21 MPa (2.1 bar; 30 psi) @ 25°C (77°F) | |||||
| Maximum operating temperature | 70°C (158°F) @ 30 psi | 70°C (158°F) @ 23 psi | ||||
Successfully Opted for software Updates
Part Numbers
| Part Number | Form Factor | Typical Flow Rate | Membrane/Media | Chemlock® Key | Length | Retention Rating | Connection | O-ring |
|---|---|---|---|---|---|---|---|---|
| IHAMC1M01 | Cartridge | Mid-High Flux | PS | No | 10" | 7 nm | N/A | E-FKM |
| IHAMC1M01K | Cartridge | Mid-High Flux | PS | Yes | 10" | 7 nm | N/A | E-FKM |
| IHAMC2M01 | Cartridge | High Flux | PS | No | 20" | 7 nm | N/A | E-FKM |
| IHAMC2M01K | Cartridge | High Flux | PS | Yes | 20" | 7 nm | N/A | E-FKM |
| IHAT01M01 | Cartridge | Mid-High Flux | UPE | No | 10" | 10 nm | N/A | E-FKM |
| IHAT01M01K | Cartridge | Mid-High Flux | UPE | Yes | 10" | 10 nm | N/A | E-FKM |
| IHAT02M01 | Cartridge | High Flux | UPE | No | 20" | 10 nm | N/A | E-FKM |
| IHAV01P01 | Cartridge | Mid flux | UPE | No | 10" | 0.1 µm | N/A | E-FKM |
| IHAV01P01K | Cartridge | Mid flux | UPE | Yes | 10" | 0.1 µm | N/A | E-FKM |
| IHAV01PLT | Cartridge | Low Flux | UPE | No | 10" | 0.1 µm | N/A | E-FKM |
| IHAV01PLTK | Cartridge | Low Flux | UPE | Yes | 10" | 0.1 µm | N/A | E-FKM |
| IHAV02P01 | Cartridge | Mid-High Flux | UPE | No | 20" | 0.1 µm | N/A | E-FKM |
| IHAV02P01K | Cartridge | Mid-High Flux | UPE | Yes | 20" | 0.1 µm | N/A | E-FKM |
| IHAV0SP01 | Cartridge | Low Flux | UPE | No | 4" | 0.1 µm | N/A | E-FKM |
| IHAX01M01 | Cartridge | Mid-High Flux | PS | No | 10" | 20 nm | N/A | E-FKM |
| IHAX01M01K | Cartridge | Mid-High Flux | PS | Yes | 10" | 20 nm | N/A | E-FKM |
| IHAX02M01 | Cartridge | High Flux | PS | No | 20" | 20 nm | N/A | E-FKM |
| IHAX02MK1K | Cartridge | High Flux | PS | Yes | 20" | 20 nm | N/A | Kalrez® 4079 |
| IHAY01M01 | Cartridge | Mid-High Flux | UPE | No | 10" | 30 nm | N/A | E-FKM |
| IHAY01M01K | Cartridge | Mid-High Flux | UPE | Yes | 10" | 30 nm | N/A | E-FKM |
| IHAY02M01 | Cartridge | High Flux | UPE | No | 20" | 30 nm | N/A | E-FKM |
| IHAZ01M01 | Cartridge | Mid-High Flux | UPE | No | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ01M01K | Cartridge | Mid-High Flux | UPE | Yes | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ01P01 | Cartridge | Mid flux | UPE | No | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ01P01K | Cartridge | Mid flux | UPE | Yes | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ01PLK | Cartridge | Low Flux | UPE | No | 10" | 0.05 µm | N/A | Kalrez® 4079 |
| IHAZ01PLT | Cartridge | Low Flux | UPE | No | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ01PLTK | Cartridge | Low Flux | UPE | Yes | 10" | 0.05 µm | N/A | E-FKM |
| IHAZ02P01 | Cartridge | High Flux | UPE | No | 20" | 0.05 µm | N/A | E-FKM |
| IHAZ02P01K | Cartridge | High Flux | UPE | Yes | 20" | 0.05 µm | N/A | E-FKM |
| IHAZ0SP01 | Cartridge | Low Flux | UPE | No | 4" | 0.05 µm | N/A | E-FKM |
| IHDMCSM4F | Chem-Line™ II Large Disposable | Mid-High Flux | PS | N/A | 10" | 7 nm | — | N/A |
| IHDVHPS1F | Chem-Line™ II Large Disposable | Low Flux | UPE | N/A | 4" | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings | N/A |
| IHDVHPX0F | Chem-Line™ II Large Disposable | Mid flux | UPE | N/A | 10" | 0.1 µm | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A |
| IHDXHSM4F | Chem-Line™ II Large Disposable | Mid-High Flux | PS | N/A | 10" | 20 nm | — | N/A |
| IHDXHSS1F | Chem-Line™ II Large Disposable | Low Flux | PS | N/A | 4" | 20 nm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings | N/A |
| IHDXHSS2F | Chem-Line™ II Large Disposable | Low Flux | PS | N/A | 4" | 20 nm | 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A |
| IHDYHPS1F | Chem-Line™ II Large Disposable | Low Flux | UPE | N/A | 4" | 30 nm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings | N/A |
| IHDZHPM0F | Chem-Line™ II Large Disposable | High Flux | UPE | N/A | 10" | 0.05 µm | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A |
| IHDZHPM4F | Chem-Line™ II Large Disposable | High Flux | UPE | N/A | 10" | 0.05 µm | — | N/A |
| IHDZHPS1F | Chem-Line™ II Large Disposable | Low Flux | UPE | N/A | 4" | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings | N/A |
| IHDZHPS2F | Chem-Line™ II Large Disposable | Low Flux | UPE | N/A | 4" | 0.05 µm | In-line male, 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® | N/A |
| IHDZHPX0F | Chem-Line™ II Large Disposable | Mid flux | UPE | N/A | 10" | 0.05 µm | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A |
| IHDZHPX2F | Chem-Line™ II Large Disposable | Mid flux | UPE | N/A | 10" | 0.05 µm | 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A |
| IHLMCSM0P3PM | Chem-Line™ II Large Disposable | Mid-High Flux | PS | N/A | 10" | 7 nm | 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | N/A |
| IHLMCSM4P3PM | Chem-Line™ II Large Disposable | Mid-High Flux | PS | N/A | 10" | 7 nm | 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | N/A |
| IHPXHSM3S | Chem-Line™ I Large Disposable | Mid-High Flux | PS | N/A | 10" | 20 nm | 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | N/A |
| IHPXHSM4S | Chem-Line™ I Large Disposable | High Flux | PS | N/A | 10" | 20 nm | 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | N/A |
| IHPYHPM4S | Chem-Line™ I Large Disposable | High Flux | UPE | N/A | 10" | 30 nm | 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | N/A |
| IHPZHPM3S | Chem-Line™ I Large Disposable | High Flux | UPE | N/A | 10" | 0.05 µm | 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | N/A |