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Microgard™ Gen 1 UPE Filter

Designed for 5 nm and below advanced nodes, these filters are optimized for small contaminant retention and reduce on-wafer defectivity while providing consistent filtration performance.

UPE membrane provides high removal efficiency of small contaminants, reducing wafer defect potential
Optimized flow rate achieves high retention of small contaminants without significantly impacting productivity
Utilizes our latest UPE cleaning process, Ultraclean Plus (UCP), which provides consistent filtration performance and meets critical process cleanliness demands
Includes 10" and 20" cartridge filters as well as a disposable configuration to meet your application needs

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Applications Microgard™ Gen 1 UPE Filter Applications

Ideally suited for 5 nm and below advanced photochemical applications, including;

Photoresist
Solvents
Other ancillary chemicals

Specifications

Drawings

Cartridge Filters (70 mm)
Length	Dimension A	Dimension B
10"	262.3 mm (10.33")	245.0 mm (9.65")
20"	506.5 mm (19.94")	489.2 mm (19.26")

Cartridge Filters (83 mm)
Length	Dimension A	Dimension B
10"	242.3 mm (9.54")	225.0 mm (8.86")
20"	471.0 mm (18.54")	454.0 mm (17.87")

Performance Data

Product Specifications

		Cartridge	Disposable
Materials of construction	Supports, core, sleeve	High density polyethylene (HDPE)
	Membrane	UPE
	O-ring	E-FKM (2-222)	—
Connection		—	1/4" compression fitting
Membrane area	10"	70 mm: 1.15 m²(12.4 ft²)	0.22 m² (2.4 ft²)
		83 mm: 1.69 m² (18.2 ft²)
	20"	70 mm: 2.30 m²(24.8 ft²)
		83 mm: 3.39 m² (26.5 ft²)
Flow performance	10"	70 mm: 2.0 L/min @ 39.2 kPa (5.7 psi)	0.625 L/min @ 58.8 kPa (8.5 psi)
		83 mm: 3.3 L/min @ 39.2 kPa (5.7 psi)
	20"	70 mm: 4.0 L/min @ 39.2 kPa (5.7 psi)
		83 mm: 6.5 L/min @ 39.2 kPa (5.7 psi)
Maximum operating conditions		Max. forward differential/reverse pressure: 0.24 MPa (35 psi) @ 25°C (77°F)	Max. inlet pressure: 0.34 MPa (50 psi) @ 25°C (77°F) Max. forward differential/reverse pressure: 0.27 MPa (39 psi) @ 25°C (77°F)
		Max. operating temperature: 60°C (140°F)
Metallic extractables		Ultraclean Plus: 23 metals

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Aug 18, 2020 Data Sheet Microgard™ Gen 1 UPE Cartridge and Disposable Filters

355.6 kB

Part Numbers

Microgard™ Gen 1 UPE Filter Part Numbers

Part Number	Product Type	Diameter	Length
MU0101MTP100ND	Cartridge filter	70 mm	10"
MU0102MTP100ND	Cartridge filter	70 mm	20"
MU0102XTP100ND	Cartridge filter	83 mm	20"
MU01DS10P200ND	Small disposable filter	N/A	N/A

Microgard™ Gen 1 UPE Filter

Specifications

Cartridge Filters (70 mm)

Cartridge Filters (83 mm)

Cartridge

Disposable