Optimizer® D Filter
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- Filtration of photoresists in photolithography applications
- Filtration of process chemicals in chemical manufacturing
- Point-of-tool and point-of-dispense
Specifications
Materials | Membrane: | D, D300/D600, D PR/D PR-L: UPE (hydrophobic, symmetric) |
D LE: UPE (hydrophobic, asymmetric) | ||
Core: | D/D LE, D300/D600: HDPE | |
D PR/D PR-L: PP | ||
Supports: | D/D LE, D300/D600: HDPE | |
Housing: | D/D LE, D300/D600, D PR/D PR-L: HDPE | |
D PR/D PR-L: PP | ||
Connections | Inlet/outlet: | All: 1/4" compression seal |
D PR-L: 3/8" compression seal | ||
Vent/drain: | D/D LE, D PR/D PR-L: 1/4" compression seal | |
D300/D600: 1/8" compression seal | ||
Membrane area | D/D LE 10 nm: | 2600 cm² (2.80 ft²) |
D/D LE 20 nm: | 2200 cm2 (2.37 ft2) | |
D/D LE 30 nm: | 1600 cm2 (1.72 ft2) | |
D/D LE 0.05 µm, 0.1 µm, 0.2 µm: | 1800 cm2 (1.94 ft2) short | |
3100 cm2 (3.33 ft2) long | ||
D/D LE 3 nm, 5 nm, 10 nm*: | 2300 cm2 (2.47 ft2) short | |
4000 cm2 (4.31 ft2) long | ||
D300: | 300 cm2 (0.32 ft2) | |
D600: | 600 cm² (0.65 ft²) | |
D PR: | 1800 cm2 (1.94 ft2) | |
D PR 20 nm: | 2200 cm2 (2.37 ft2) | |
D PR 30 nm: | 1900 cm2 (2.05 ft2) | |
D PR-L: | 3600 cm2 (3.88 ft2) | |
Retention rating | D (symmetric): | 10 nm, 20 nm, 30 nm, 0.05 µm, 0.1 µm, 0.2 µm |
D LE (asymmetric): | 3 nm, 5 nm, 10 nm | |
D300/D600: | 10 nm, 20 nm, 0.05 µm, 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm | |
D PR/D PR-L: | 20 nm, 30 nm, 0.05 µm, 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm | |
Operating conditions | Maximum operating pressure: | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) |
Maximum forward/reverse differential pressure: | D/D LE, D PR/D PR-L: 0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) | |
D300/D600: 0.24 MPa (2.4 bar, 35 psi) @ 25°C (77°F) | ||
Maximum operating temperature: | 60°C (140°F) | |
*D LE only Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). |
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