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Optimizer® D Filter

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Point-of-use photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 - 180 nm technology nodes.

Cost-effective, scalable and convenient alternative for testing and particle evaluation of process chemicals
Optimized filter improves filtration of photoresists and other process chemicals without releasing retained particles back into the process
No prewetting required for UPE membrane reduces the potential sources of microbubble formation and avoids problems associated with incomplete wetting and the mixing of incompatible chemicals

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Membrane/Media

Filter Cleaning

Lithography Technology

Retention Rating

Membrane Area

Connection

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CAD CAD Files

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Applications Optimizer® D Filter Applications

Filtration of photoresists in photolithography applications
Filtration of process chemicals in chemical manufacturing
Point-of-tool and point-of-dispense

Specifications

Drawings

Performance Data

Product Specifications

Materials	Membrane:	D, D300/D600, D PR/D PR-L: UPE (hydrophobic, symmetric)
		D LE: UPE (hydrophobic, asymmetric)
	Core:	D/D LE, D300/D600: HDPE
		D PR/D PR-L: PP
	Supports:	D/D LE, D300/D600: HDPE
	Housing:	D/D LE, D300/D600, D PR/D PR-L: HDPE
		D PR/D PR-L: PP
Connections	Inlet/outlet:	All: 1/4" compression seal
		D PR-L: 3/8" compression seal
	Vent/drain:	D/D LE, D PR/D PR-L: 1/4" compression seal
		D300/D600: 1/8" compression seal
Membrane area	D/D LE 10 nm:	2600 cm² (2.80 ft²)
	D/D LE 20 nm:	2200 cm² (2.37 ft²)
	D/D LE 30 nm:	1600 cm² (1.72 ft²)
	D/D LE 0.05 µm, 0.1 µm, 0.2 µm:	1800 cm² (1.94 ft²) short
		3100 cm² (3.33 ft²) long
	D/D LE 3 nm, 5 nm, 10 nm*:	2300 cm² (2.47 ft²) short
		4000 cm² (4.31 ft²) long
	D300:	300 cm² (0.32 ft²)
	D600:	600 cm² (0.65 ft²)
	D PR:	1800 cm² (1.94 ft²)
	D PR 20 nm:	2200 cm² (2.37 ft²)
	D PR 30 nm:	1900 cm² (2.05 ft²)
	D PR-L:	3600 cm² (3.88 ft²)
Retention rating	D (symmetric):	10 nm, 20 nm, 30 nm, 0.05 µm, 0.1 µm, 0.2 µm
	D LE (asymmetric):	3 nm, 5 nm, 10 nm
	D300/D600:	10 nm, 20 nm, 0.05 µm, 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm
	D PR/D PR-L:	20 nm, 30 nm, 0.05 µm, 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm
Operating conditions	Maximum operating pressure:	0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
	Maximum forward/reverse differential pressure:	D/D LE, D PR/D PR-L: 0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
		D300/D600: 0.24 MPa (2.4 bar, 35 psi) @ 25°C (77°F)
	Maximum operating temperature:	60°C (140°F)
*D LE only Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date).

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Apr 1, 2022 Data Sheet Optimizer® Filters

645.5 kB

Published Jul 1, 2021 Brochure Chasing the Perfect Pattern

1.4 MB

Part Numbers

Optimizer® D Filter Part Numbers

Part Number	Form Factor	Membrane/Media	Filter Cleaning	Lithography Technology	Retention Rating	Membrane Area	Connection
CWAG031S2	D300	UPE	Standard	KrF	0.2 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAG061S2	D600	UPE	Standard	KrF	0.2 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAG0L0S1	DPR-L	UPE	Standard	KrF	0.2 µm	3600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAG0S0P1	DPR	UPE	Standard	KrF	0.2 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWAG0S0S1	DPR	UPE	Standard	KrF	0.2 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAG0S1S1	D	UPE	Standard	KrF	0.2 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAG0S1S3	Short Capsule	UPE	Standard	KrF	0.2 µm	—	—
CWAT031S2	D300	UPE	Standard	Immersion	10 nm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAT061S2	D600	UPE	Standard	Immersion	10 nm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAT0S1S1M	D	UPE	Standard	Immersion	10 nm	2600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAT0S1S3M	D	UPE	Standard	Immersion	10 nm	2600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAV031S2	D300	UPE	Standard	KrF	0.1 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAV061S2	D600	UPE	Standard	KrF	0.1 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAV0L0S1	DPR-L	UPE	Standard	KrF	0.1 µm	3600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAV0S0P1	DPR	UPE	Standard	KrF	0.1 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWAV0S0S1	DPR	UPE	Standard	KrF	0.1 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAV0S1S3	D	UPE	Standard	KrF	0.1 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAV3L0HC	DPR-L	UPE	Standard	KrF	0.1 µm	3800 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAV3L0S1	DPR-L	UPE	Standard	KrF	0.1 µm	3600 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAX031S2	D300	UPE	Standard	ArF	20 nm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAX061S2	D600	UPE	Standard	ArF	0.02 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAX0L0S1M	DPR-L	UPE	Standard	ArF	20 nm	4400 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAX0S0P1	DPR	UPE	Standard	ArF	20 nm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWAX0S1S3	D	UPE	Standard	ArF	20 nm	2200 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAX3L0S1M	DPR-L	UPE	Standard	ArF	20 nm	4400 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAY0S0P1	DPR	UPE	Standard	ArF	0.03 µm	1900 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWAY0S1HC	Short Capsule	UPE	Standard	ArF	0.03 µm	—	—
CWAY0S1S3	D	UPE	Standard	ArF	0.03 µm	1600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAY3L0HC	DPR-L	UPE	Standard	ArF	0.03 µm	3800 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ031S2	D300	UPE	Standard	KrF	0.05 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAZ061S2	D600	UPE	Standard	KrF	0.05 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWAZ0L0S1	DPR-L	UPE	Standard	KrF	0.05 µm	3600 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ0S0P1	DPR	UPE	Standard	KrF	0.05 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWAZ0S0S1	DPR	UPE	Standard	KrF	0.05 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ0S0X1	DPR	UPE	Standard	KrF	0.05 µm	1900 cm2	1/4" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings
CWAZ0S1HC	Short Capsule	UPE	Standard	KrF	0.05 µm	—	—
CWAZ0S1S3	Short Capsule	UPE	Standard	KrF	0.05 µm	1800 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ3L0HC	DPR-L	UPE	Standard	KrF	0.05 µm	3800 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ3L0S1	DPR-L	UPE	Standard	KrF	0.05 µm	3600 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWAZ3L0ST	DPR-L	UPE	Standard	KrF	0.05 µm	3600 cm2	3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CWCK031S2	D300	UPE	Standard	EUV, Other	3 nm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWCK061S2	D600	UPE	Standard	EUV, Other	3 nm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWCK0S2S1UC	D	UPE	Ultraclean (UC)	EUV, Other	3 nm	—	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWCT0S0P1	DPR	UPE	Standard	EUV, Other	3 nm	—	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWDK061S2	D600	DUO	Standard	EUV, Other	3 nm	440 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWDK0S2S3	D	DUO	Standard	EUV, Other	3 nm	1500 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWMX031S2	D300	UPE	Ultraclean (UC)	ArF	0.02 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWMX0S0P1N	DPR	UPE	Ultraclean (UC)	ArF	20 nm	2200 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWMX0S0X1	DPR	UPE	Ultraclean (UC)	ArF	0.02 µm	2200 cm2	1/4" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings
CWMX0S1S3	D	UPE	Ultraclean (UC)	ArF	0.02 µm	2200 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWNT0L0P1	DPR-L	Nylon	Standard	Immersion	10 nm	2500 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWNT0S0P1	DPR	Nylon	Standard	Immersion	10 nm	1400 cm2	1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CWNT3L0F1	DPR-L	Nylon	Standard	Immersion	10 nm	2500 cm2	3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings
CWNT3L0P1	DPR-L	Nylon	Standard	Immersion	10 nm	2500 cm2	3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CWNT3L0X1	DPR-L	Nylon	Standard	Immersion	10 nm	2500 cm2	3/8" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings
CWNT8L0P1	DPR-L	Nylon	Standard	Immersion	10 nm	2500 cm2	8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CWNX3L0F1	DPR-L	Nylon	Standard	ArF	20 nm	2500 cm2	3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings
CWNX3L0X1	DPR-L	Nylon	Standard	ArF	20 nm	2500 cm2	3/8" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings
CWNZ0S2S3	D	Nylon	Standard	KrF	0.05 µm	1400 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWSF031S2	D300	UPE	Standard	EUV, Other	5 nm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWSF061S2	D600	UPE	Standard	EUV, Other	5 nm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWSF0S2S3M	D	UPE	Standard	EUV, Other	5 nm	—	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWSF3L0P1	DPR-L	UPE	Standard	EUV, Other	5 nm	4000 cm2	3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CWSF6S0P1	DPR	UPE	Standard	EUV, Other	5 nm	—	6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CWSK0S2S3M	D	UPE	Standard	EUV, Other	3.0 µm	—	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWST0S2S3M	D	UPE	Standard	Immersion	10 nm	—	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWUA031S2	D300	UPE	Standard	KrF	1 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWUA061S2	D600	UPE	Standard	KrF	1 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWUG0L2S1	D-L	UPE	Standard	KrF	0.2 µm	3100 cm2	1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CWUH031S2	D300	UPE	Standard	KrF	0.5 µm	300 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings
CWUH061S2	D600	UPE	Standard	KrF	0.5 µm	600 cm2	1/4" inlet/outlet, 1/8" vent/drain, compression fittings