Optimizer® DEV Filter
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- Industry: Semiconductor, Data Storage
- Process: Photolithography, Magnetic Head - Photolithography
- Chemistry: DI Water, Solvent, Photochemical
- Installation Point: Point of Tool
Specifications
Dimensions | |||||||
Fitting | Inlet/outlet size | A | B | C | D | E | F |
Compression seal | 6.35 mm (1/4") | 189 mm (7.44") | 169 mm (6.65") | 69 mm (2.72") | 113 mm (4.45") | 92 mm (3.62") | 69 mm (2.72") |
9.53 mm (3/8") | 192 mm (7.56") | 169 mm (6.65") | 69 mm (2.72") | — | — | — | |
Super Type Pillar | 6 mm | — | — | — | 122 mm (4.80") | 97 mm (3.81") | 71 mm (2.80") |
6.35 mm (1/4") | — | — | — | 122 mm (4.80") | 97 mm (3.81") | 71 mm (2.80") | |
8 mm | 205 mm (8.07") | 175 mm (6.89") | 71 mm (2.80") | 127 mm (5.00") | 97 mm (3.81") | 71 mm (2.80") | |
9.53 mm (3/8") | 209 mm (8.23") | 175 mm (6.89") | 71 mm (2.80") | — | — | — | |
12.7 mm (1/2") | 185 mm (7.28") | 145 mm (5.71") | 82 mm (3.23") | — | — | — |
Materials | Membrane: | UPE* |
Supports: | HDPE | |
Housing, core, sleeve: | PP | |
Membrane area | DEV | 1800 cm² (1.94 ft²) |
DEV-L | 3600 cm² (3.88 ft²) | |
DEV (30 nm) | 2600 cm² (2.80 ft²) | |
DEV-L (30 nm) | 4500 cm² (4.84 ft²) | |
Retention ratings | DEV, DEV-L | 0.1, 0.05 µm, 30 nm, 20 nm |
Fittings | Available in a wide range of fittings including Super Type Pillar® fittings, compression seal (Swagelok® compatible fittings) and Flaretek® fittings. | |
Operating conditions | Maximum inlet pressure: | 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F) |
Maximum forward/reverse differential pressure: | 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F) | |
0.28 MPa (2.8 bar, 40 psid, 2.8 kg/cm²) @ 25°C (77°F) | ||
Operating temperature: | 60°C (140°F) | |
*Surface-modified UPE | ||
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). |
Successfully Opted for software Updates
Part Number | Lithography Technology | Length | Retention Rating | Connection |
---|---|---|---|---|
CHUT0S0P1 | Immersion | Short Capsule | 10 nm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUT3L0P1 | Immersion | Long Capsule | 10 nm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUV0L0P1 | KrF | Long Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUV0L0S1 | KrF | Long Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUV0S0F1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CHUV0S0P1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUV0S0S1 | KrF | Short Capsule | 0.1 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUV2L0P1 | KrF | Long Capsule | 0.1 µm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CHUV3L0F1 | KrF | Long Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings |
CHUV3L0P1 | KrF | Long Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUV3L0S1 | KrF | Long Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUV3S0S1 | KrF | Short Capsule | 0.1 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUV6S0P1 | KrF | Short Capsule | 0.1 µm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUV8L0P1 | KrF | Long Capsule | 0.1 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUV8S0P1 | KrF | Short Capsule | 0.1 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUX0L0P1M | ArF | Long Capsule | 20 nm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUX0L0S1M | ArF | Long Capsule | 20 nm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUX0S0P1M | ArF | Short Capsule | 20 nm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUX0S0S1M | ArF | Short Capsule | 20 nm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUX3L0P1M | ArF | Long Capsule | 20 nm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUX6S0P1M | ArF | Short Capsule | 20 nm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUX8S0P1M | ArF | Short Capsule | 20 nm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUY0L0F1M | ArF | Long Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CHUY0L0P1M | ArF | Long Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUY0L0S1M | ArF | Long Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUY0S0P1M | ArF | Short Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUY0S0S1M | ArF | Short Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUY2L0P1M | ArF | Long Capsule | 30 nm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CHUY3L0F1M | ArF | Long Capsule | 30 nm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings |
CHUY3L0P1M | ArF | Long Capsule | 30 nm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUY3L0S1M | ArF | Long Capsule | 30 nm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUY6S0P1M | ArF | Short Capsule | 30 nm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUY8L0P1M | ArF | Long Capsule | 30 nm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUY8S0P1M | ArF | Short Capsule | 30 nm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUZ0L0F1 | ArF | Long Capsule | 30 nm | 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
CHUZ0L0P1 | KrF | Long Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUZ0L0S1 | KrF | Long Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUZ0S0P1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting |
CHUZ0S0S1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUZ0S0X1 | KrF | Short Capsule | 0.05 µm | 1/4" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings |
CHUZ2L0P1 | KrF | Long Capsule | 0.05 µm | 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting |
CHUZ3L0F1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings |
CHUZ3L0P1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings |
CHUZ3L0S1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain, compression fittings |
CHUZ3L0X1 | KrF | Long Capsule | 0.05 µm | 3/8" inlet/outlet, 1/4" vent/drain, Flowell™ 60 fittings |
CHUZ6S0P1 | KrF | Short Capsule | 0.05 µm | 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUZ8L0P1 | KrF | Long Capsule | 0.05 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |
CHUZ8S0P1 | KrF | Short Capsule | 0.05 µm | 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings |