Planarcap® TPX Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Industry: Semiconductor
- Process: CMP
- Chemistry: Slurry
- Installation Point: Point of Dispense
Specifications
Materials: | Medium: Pleated depth polypropylene Core, cage, and shell: Polypropylene |
Connections: | Inlet/outlet: 3/8" or 1/4" Flaretek® fitting Vent/drain: 1/4" Flaretek® fitting |
Maximum operating conditions: | Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C Maximum forward/reverse differential pressure: 0.27 MPA (2.7 bar, 40 PSI) at 20°C Maximum operating temperature: 40°C (104°F) |
Successfully Opted for software Updates
Part Number | Length | Retention Rating | Connection |
---|---|---|---|
PCT010L2F | 5" | 0.1 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT010LF1 | 5" | 0.1 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT010S2F | 2.5" | 0.1 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT010SF1 | 2.5" | 0.1 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT013LF1 | 5" | 0.1 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |
PCT013SF1 | 2.5" | 0.1 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |
PCT020L2F | 5" | 0.2 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT020LF1 | 5" | 0.2 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT020S2F | 2.5" | 0.2 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT020SF1 | 2.5" | 0.2 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT023LF1 | 5" | 0.2 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |
PCT023SF1 | 2.5" | 0.2 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |
PCT030L2F | 5" | 0.3 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT030LF1 | 5" | 0.3 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT030S2F | 2.5" | 0.3 µm | 1/4" flare inlet/outlet, 1/8" MNPT vent/drain |
PCT030SF1 | 2.5" | 0.3 µm | 1/4" flare inlet/outlet, 1/4" flare vent/drain |
PCT033LF1 | 5" | 0.3 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |
PCT033SF1 | 5" | 0.3 µm | 3/8" flare inlet/outlet, 1/4" flare vent/drain |