Planargard® CL Filter
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Applications
- Industry: Semiconductor
- Process: CMP
- Chemistry: Slurry
- Installation Point: Bulk
Specifications
| Materials: | Membrane, core, sleeve, endcaps: Polypropylene |
| O-ring: EPR | |
| Connection: | Code 0, 2-222 |
| Maximum operating conditions: | Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) at 25°C |
| Maximum reverse pressure: 0.15 MPa (1.5 bar, 22 PSI) at 20°C | |
| Available sizes: | 5”, 10”, 20”, 30” |
| Available retention ratings: | 0.3, 0.5, 0.7 and 1.0 μm |
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Part Numbers
| Part Number | Chemlock® Key | Length | Retention Rating | Connection |
|---|---|---|---|---|
| PCL0301E6 | No | 10" | 0.3 µm | Code 0 |
| PCL0302E6 | No | 20" | 0.3 µm | Code 0 |
| PCL0303E6 | No | 30" | 0.3 µm | Code 0 |
| PCL0501E6 | No | 10" | 0.5 µm | Code 0 |
| PCL0701E6Y | Yes | 10" | 0.7 µm | Code 0 |
| PCL0702E6 | No | 20" | 0.7 µm | Code 0 |
| PCL1001E6 | No | 10" | 1 µm | Code 0 |
| PCL1001E6Y | Yes | 10" | 1 µm | Code 0 |
| PCL3001E6Y | Yes | 10" | 3.0 µm | Code 0 |
| PCL3002E6 | No | 20" | 3.0 µm | Code 0 |