QuickChange® NX Filter
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- Industry: Semiconductor, Flat Panel Display, Data Storage, LED
- Process: Wet Etch and Clean, Magnetic Head - Wet Etch and Clean, Bulk Chemical Delivery
- Chemistry: Aggressive Acids, Aggressive Bases, Solvents
- Installation Point: Point of Tool, Point of Dispense, Bulk
Specifications
Materials: | Membrane | Prewet, nondewetting PTFE | |||||
Supports | PFA | ||||||
For Cartridge Filters | |||||||
Cartridge connections | Code 0 (AS568-222) o-rings | ||||||
Cartridge o-ring | E-FKM, E-ETP, Chemraz® or Kalrez® | ||||||
Key (cartridge with Chemlock® key only) | PFA | ||||||
For Disposable Filters | |||||||
Shell | PFA | ||||||
Retention rating: | 15 nm (NXT, NXE, NXF, NXG) 30 nm, 0.05 µm, 0.1 µm, 0.2 µm (NXT, NXX, NXM, NXE) | ||||||
Membrane area: | NXT | NXX | NXM | NXE | NXM | NXG | |
30 nm, 0.05 µm, 0.1 µm, 0.2 µm | |||||||
4" | – | 0.5 m2 (5.4 ft2) | – | – | – | – | |
10" | 0.9 m2 (9.7 ft2) | 1.3 m2 (14 ft2) | 1.8 m2 (19.4 ft2) | 2.2 m2 (23.7 ft2) | – | – | |
20" | 1.8 m2 (19.4 ft2) | 2.6 m2 (28 ft2) | 3.6 m2 (38.8 ft2) | 4.4 m2 (47.4 ft2) | – | – | |
30" | 2.7 m2 (29 ft2) | – | – | – | – | – | |
15 nm | |||||||
10" | 0.9 m2 (9.7 ft2) | _ | _ | 2 m2 (21.5 ft2 | 2.4 m2 (25.8 ft2 | 3 m2 (32.3 ft2) | |
20" | 1.8 m2 (19.4 ft2) | – | – | 4 m2 (43.1 ft2) | 4.8 m2 (51.7 ft2) | 6 m2 (64.6 ft2) | |
Maximum operating conditions: | Maximum operating pressure | 0.58 MPa (5.8 bar, 84 psi) @ 25ºC (77°F) 0.097 MPa (0.97 bar, 14 psi) @ 200ºC (392°F) | |||||
Maximum forward differential pressure | 0.44 MPa (4.4 bar, 64 psi) @ 25ºC (77°F) 0.05 MPa (0.52 bar, 7.5 psi) @ 200ºC (392°F) | ||||||
Maximum reverse pressure | 0.34 MPa (3.45 bar, 50 psi) @ 25ºC (77°F) | ||||||
Maximum operating temperature | 200°C (392°F) | ||||||
Metallic extractables: | Standard and UCM-16:Testing conducted for 23 metals | ||||||
Other extractables: | Standard and UCM-16: TOC, Cl, F |
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