Rinsegard® HP Filter
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Applications
- Industry: Semiconductor
- Process: Wet Etch and Clean
- Chemical: DI Water
- Installation Point: Point of Tool
Specifications
HP Cartridge
| Materials: | Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) |
| Supports, core, and sleeve: High-density polyethylene (HDPE) | |
| O-rings: Fluoropolymer encapsulated Viton® fluoroelastomer (TEV) | |
| Cleanliness: | Filter contributes <2 particles/mL ≥0.2 μm after five-minute flush at 5 L/min. |
| Connections: | Code 0 (2-222) |
| Membrane area: | 8,500 cm2 (9.2 ft2) |
| 0.05 µm: 8,000 cm2 (8.6 ft2) | |
| Maximum operating conditions: | Maximum forward/reverse differential pressure: 0.35 MPa (3.5 bar, 50 psi) at 25°C |
| Maximum operating temperature: 60°C (140°F) |
HPX Cartridge
| Materials: | Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) |
| Supports, core, and sleeve: High-density polyethylene (HDPE) | |
| O-rings: Fluoropolymer encapsulated Viton fluoroelastomer (TEV) | |
| Cleanliness: | Filter contributes <2 particles/mL ≥0.2 μm after five-minute flush at 5 L/min. |
| Membrane area: | 4": 5,000 cm2 (5.4 ft2) 10": 11,000 cm2 (11.8 ft2) 20": 22,000 cm2 (23.6 ft2) 30": 33,000 cm2 (35.4 ft2) |
| 0.05 µm: 8,000 cm2 (8.6 ft2) | |
| Maximum operating conditions: | Maximum forward/reverse differential pressure: 0.35 MPa (3.5 bar, 50 psi) at 25°C |
| Maximum operating temperature: 60°C (140°F) |
HPX Disposable
| Materials: | Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE) |
| Supports, core, and sleeve: High-density polyethylene (HDPE) | |
| Disposable shell: Polypropylene | |
| Cleanliness: | Filter contributes <2 particles/mL ≥0.2 μm after five-minute flush at 5 L/min. |
| Connections: | Inlet/outlet: 3/4" or 1" Flaretek® compatible fittings Vent/drain: 1/4" Flaretek compatible fittings |
| Membrane area: | 4": 5,000 cm2 (5.4 ft2) 10": 11,000 cm2 (11.8 ft2) |
| 0.05 µm: 8,000 cm2 (8.6 ft2) | |
| Maximum operating conditions: | Maximum forward/reverse differential pressure: 0.35 MPa (3.5 bar, 50 psi) at 25°C |
| Maximum operating temperature: 70°C (158°F) |
Note: Not compatible with ozone.
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Part Numbers
| Part Number | Form Factor | Typical Flow Rate | Chemlock® Key | Maximum Temperature | Length | Retention Rating | Connection |
|---|---|---|---|---|---|---|---|
| RGCG01P01 | Cartridge | Mid flux | No | 60°C (140°F) | 10" | 0.2 µm | Code 0, double 2-222 |
| RGCG01P01K | Cartridge | Mid flux | Yes | 60°C (140°F) | 10" | 0.2 µm | Code 0, double 2-222 |
| RGCG01PLT | Cartridge | Low Flux | No | 60°C (140°F) | 10" | 0.2 µm | Code 0, double 2-222 |
| RGCV01P01 | Cartridge | Mid flux | No | 60°C (140°F) | 10" | 0.1 µm | Code 0, double 2-222 |
| RGCV01P01K | Cartridge | Mid flux | Yes | 60°C (140°F) | 10" | 0.1 µm | Code 0, double 2-222 |
| RGCV01PLT | Cartridge | Low Flux | No | 60°C (140°F) | 10" | 0.1 µm | Code 0, double 2-222 |
| RGCV01PLTK | Cartridge | Low Flux | Yes | 60°C (140°F) | 10" | 0.1 µm | Code 0, double 2-222 |
| RGCV0SP01 | Cartridge | Mid flux | No | 60°C (140°F) | 4" | 0.1 µm | Code 0, double 2-222 |
| RGCZ01P01 | Cartridge | Mid flux | No | 60°C (140°F) | 10" | 0.05 µm | Code 0, double 2-222 |
| RGCZ01P01K | Cartridge | Mid flux | Yes | 60°C (140°F) | 10" | 0.05 µm | Code 0, double 2-222 |
| RGCZ01PLT | Cartridge | Low Flux | No | 60°C (140°F) | 10" | 0.05 µm | Code 0, double 2-222 |
| RGCZ01PLTK | Cartridge | Low Flux | Yes | 60°C (140°F) | 10" | 0.05 µm | Code 0, double 2-222 |
| RGCZ02P01 | Cartridge | Mid flux | No | 60°C (140°F) | 20" | 0.05 µm | Code 0, double 2-222 |
| RGDVHPX0F | Chem-Line™ II Large Disposable | Mid flux | N/A | 70°C (158°F) | 10" | 0.1 µm | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
| RGDVHPX4F | Chem-Line™ II Large Disposable | Mid flux | N/A | 70°C (158°F) | 10" | 0.1 µm | 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |
| RGDZHPX0F | Chem-Line™ II Large Disposable | Mid flux | N/A | 70°C (158°F) | 10" | 0.05 µm | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting |