Solaris® NMB Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Industry: Semiconductor
- Process: CMP
- Chemistry: Slurry
- Installation Point: Point-of-Tool
Specifications
Materials | Media | Melt-blown polypropylene |
O-ring (inner cartridge) | Ethylene polypropylene rubber (EPR) | |
Operating Conditions | 50 psi @ 20°C (68°F) |
Successfully Opted for software Updates