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Solaris® NMB Filter
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Applications
- Industry: Semiconductor
- Process: CMP
- Chemistry: Slurry
- Installation Point: Point-of-Tool
Specifications
Materials | Media | Melt-blown polypropylene |
O-ring (inner cartridge) | Ethylene polypropylene rubber (EPR) | |
Operating Conditions | 50 psi @ 20°C (68°F) |
Successfully Opted for software Updates
Published Apr 24, 2018
Application Note
Effect of Flow Rate and Concentration on Filtration Efficiency of Colloidal Abrasives
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