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Solaris® NMB Filter

Best-in-class, point-of-tool slurry filter, maintaining low Large Particle Counts (LPC) and consistent particle size distribution in sub 45 nm technology nodes to prevent micro-scratches.

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Applications Solaris® NMB Filter Applications

Industry: Semiconductor
Process: CMP
Chemistry: Slurry
Installation Point: Point-of-Tool

Specifications

Drawings

Performance Data

Product Specifications

Materials:	Media: Melt-blown polypropylene O-ring (inner cartridge): Ethylene polypropylene rubber (EPR)
Operating Conditions:	50 psi @ 20°C (68°F)

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Nov 29, 2018 Data Sheet Solaris® NMB Point-of-Tool CMP Filters

Download PDF 205.8 kB

Published Aug 31, 2018 Brochure Liquid Filtration Solutions

Download PDF 2.1 MB

Published Apr 24, 2018 Application Note Effect of Flow Rate and Concentration on Filtration Efficiency of Colloidal Abrasives

Download PDF 588.9 kB

Part Numbers

Solaris® NMB Filter Part Numbers

Part Number	Retention Rating	Connection
SNB0153E1	0.1 µm	3/8" Flaretek®
SNB015CE1	0.1 µm	Connectology®
SNB0253E1	0.2 µm	3/8" Flaretek®
SNB025CE1	0.2 µm	Connectology®
SNBA753E1	70 nm	3/8" Flaretek®
SNBA75CE1	70 nm	Connectology®