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Solaris® NMB Filter

Our best-in-class, point-of-tool slurry filter for large particle reduction is optimized for colloidal, silica, ceria, and very fine alumina slurries.

Nanofiber continuous melt-blown media (NMB) has superior agglomerate and gel removal efficiency and better particle-holding capacity, prolonging filter life over traditional media
Low hold-up volume reduces waste and setup time
Self-venting filtration eliminates dead space and potential for slurry dry-out in the filtration media
Disposable Connectology® design allows for quick installation, eliminates downtime, and limits operator handling of hazardous chemicals during installation

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Applications Solaris® NMB Filter Applications

Industry: Semiconductor
Process: CMP
Chemistry: Slurry
Installation Point: Point-of-Tool

Specifications

Drawings

Performance Data

Product Specifications

Materials	Media	Melt-blown polypropylene
	O-ring (inner cartridge)	Ethylene polypropylene rubber (EPR)
Operating Conditions	50 psi @ 20°C (68°F)

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Aug 1, 2020 Data Sheet Solaris® NMB Point-of-Tool CMP Filters

Download PDF 213.1 kB

Published Jun 23, 2020 Brochure Liquid Filtration Solutions

Download PDF 2.1 MB

Published Apr 24, 2018 Application Note Effect of Flow Rate and Concentration on Filtration Efficiency of Colloidal Abrasives

Download PDF 588.9 kB

Part Numbers

Solaris® NMB Filter Part Numbers

Part Number	Retention Rating	Connection
SNB015CE1	0.1 µm	Connectology®
SNB025CE1	0.2 µm	Connectology®
SNB0753E1	0.7 µm	3/8" Flaretek®
SNB105CE1	1 µm	3/8" Flaretek®
SNB3053E1	3 µm	3/8" Flaretek®
SNB5053E1	5 µm	3/8" Flaretek®
SNBA55CE1	50 nm	Connectology®
SNBA75CE1	70 nm	Connectology®