Torrento® AT Filter
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- Industry: Semiconductor
- Process: Wet Etch and Clean
- Chemistry: Aggressive Acids, Aggressive Bases, Resist Stripper
- Installation Point: Point of Tool, Point of Dispense, Bulk
Specifications
Torrento ATE/AT3 | Torrento 1500/3000 | |||
---|---|---|---|---|
Materials: | Membrane: | Prewet, nondewetting PTFE | ||
Supports | PFA | |||
Catridge o-ring options | E-FKM, Chemraz® or Kalrez®, Viton® Extreme™ ETP |
- | ||
Shell | PFA | |||
Retention rating: | 10 nm | 15 nm | ||
20 nm | ||||
Membrane area: | 10" | ATE 10" 2 m² (21 ft²) | 1500 type 0.19 m² (2.05 ft²) | |
ATE 20" 4 m² (42 ft²) | 3000 type 0.44 m² (4.74 ft²) | |||
ATF 10" 3 m² (32 ft²) | ||||
ATF 20" 6 m² (64 ft²) | ||||
Maximum operating conditions: | Maximum operating pressure: | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) | 0.44 MPa (4.4 bar, 64 psi) @ 25°C (77°F) | |
0.097 MPa (0.97 bar; 14 psi) @ 200°C (392°F) | 0.19 MPa (1.9 bar, 28 psi) @ 95°C (203°F) | |||
Maximum forward differential pressure | 0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) | 0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F) | ||
0.05 MPa (0.52 bar, 7.5 psi) @ 180°C (356°F) | 0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F) | |||
Maximum reverse differentialpressure | 0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F) | 0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F) | ||
Maximum operating temperature: | 180°C (356°F) | 95°C (203°F) | ||
Metallic extractables: | Standard | Testing conducted for 12 metals | ||
Standard | Testing conducted for 16 metals | |||
Particle sheddings cleanliness: | <15 particles/10 mL ≥ 0.2 µm @ 5 L/min Dl water flow |
<10 particles/10 mL ≥ 0.2 µm @ 5 L/min Dl water flow |
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"Per 10" cartridge equivalent |
Successfully Opted for software Updates
Part Number | Form Factor | Typical Flow Rate | Filter Cleaning | Chemlock® Key | Length | Retention Rating | Connection | O-ring |
---|---|---|---|---|---|---|---|---|
TRCWACEB1K | Cartridge | Mid-High Flux | UCM + | Yes | 10" | 15 nm | Code 0 | E-ETP |
TRCXATE01K | Cartridge | Mid-High Flux | Standard | Yes | 10" | 20 nm | Code 0 | E-FKM |
TRCXATEK1 | Cartridge | Mid-High Flux | Standard | No | 10" | 20 nm | Code 0 | Kalrez® 4079 |
TRCXATEK1K | Cartridge | Mid-High Flux | Standard | Yes | 10" | 20 nm | Code 0 | Kalrez® 4079 |
TRCXATER1K | Cartridge | Mid-High Flux | Standard | Yes | 10" | 20 nm | Code 0 | Kalrez® 6375 |
TRCXATX01K | Cartridge | Low-Mid Flux | Standard | Yes | 10" | 20 nm | Code 0 | E-FKM |
TRCXCE2B1K | Cartridge | Mid-High Flux | UCM + | Yes | 20" | 20 nm | Code 0 | E-ETP |
TRCXTE201 | Cartridge | Mid-High Flux | Standard | No | 20" | 20 nm | Code 0 | E-FKM |
TRCXTE201K | Cartridge | Mid-High Flux | Standard | Yes | 20" | 20 nm | Code 0 | E-FKM |
TRCXTE2K1 | Cartridge | Mid-High Flux | Standard | No | 20" | 20 nm | Code 0 | Kalrez® 4079 |
TRCXTE2K1K | Cartridge | Mid-High Flux | Standard | Yes | 20" | 20 nm | Code 0 | Kalrez® 4079 |
TRDXATE0F2FM | Chem-Line™ II Large Disposable | Mid-High Flux | Standard | N/A | 10" | 20 nm | 3/4" inlet/outlet, 1/2" vent/drain, Flaretek® compatible fitting | N/A |
TRDXATE0P3PM | Chem-Line™ II Large Disposable | Mid-High Flux | UCM + | N/A | 4" | 20 nm | 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | N/A |
TRDXATETF | Chem-Line™ I Large Disposable | Mid-High Flux | Standard | N/A | 10" | 20 nm | T-tube, 3/4" inlet/outlet, 1/2" vent/drain, FlareLock® II fitting | N/A |