Torrento® S Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Industry: Semiconductor, Chemical Manufacturing
- Process: Wet Etch and Clean, Facilities
- Chemistry: Solvent
- Installation Point: Point of Tool, Point of Dispense, Bulk
Specifications
Torrento S Series ATE/AT3/ATF Cartridges | Torrento S Series 10 nm ATE/AT3/ATF Chem-Line I and II | ||
---|---|---|---|
Materials: | Membrane: | Prewet, nondewetting PTFE | |
Supports | PFA | ||
Catridge o-ring options | E-FKM, E-ETP, Kalrez® (6375UP) | - | |
Shell | PFA | ||
Retention rating: | 10 nm | ||
Membrane area: | 10" | ATE 10" 2 m² (21 ft²) | |
ATE 10" 2.4 m² (25.8 ft²) | |||
ATF 10" 2.4 m2 (25.8 ft2) ATF 20" Cartridges 4.8 m2 (51.7 ft2) |
ATF 20" Disposables N/A | ||
Cartridge connections: | Code 0 (2-222) o-rings | ||
Maximum operating conditions: | Maximum operating pressure: | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) | |
0.097 MPa (0.97 bar; 14 psi) @ 200°C (392°F) | |||
Maximum forward differential pressure | 0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) | ||
0.05 MPa (0.52 bar, 7.5 psi) @ 200°C (392°F) | |||
Maximum reverse pressure | 0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F) | ||
Maximum operating temperature: | 200°C (392°F) | ||
Metallic extractables: | UCM-16 clean | Testing conducted for 16 metals | |
Other extractables (prewet only): | UCM-16 clean | TOC, CI, NVR |
Torrento S Series 10 nm Small Disposables 1500/3000 | ||||
---|---|---|---|---|
Membrane area: | 10" | 1500 type 0.19 m² (2.05 ft²) | ||
3000 type 0.44 m² (4.74 ft²) | ||||
Maximum operating conditions: | Maximum operating pressure: | 0.59 MPa (5.9 bar, 86 psi) @ 25°C (77°F) | ||
0.19 MPa (1.9 bar, 28 psi) @ 95°C (203°F) | ||||
Maximum forward differential pressure | 0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F) | |||
0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F) | ||||
Maximum reverse pressure | 0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F) | |||
Maximum operating temperature: | 95°C (203°F) | |||
Notes: For solvents, select the "Dry" option. For aqueous-solvent blends, select the "Prewet" option. All Torrento S-series 10 nm filter configurations are PFOA free. |
Successfully Opted for software Updates
Part Number | Form Factor | Typical Flow Rate | Chemlock® Key | Prewet | O-ring | Connection | Length |
---|---|---|---|---|---|---|---|
TS2TF1CM01SP | Chem-Line™ I Large Disposable | High Flux-optimized | N/A | Yes | N/A | In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | 10" |
TSCT31C0BKP | Cartridge | High Flux | Yes | Yes | E-ETP | Code 0 | 10" |
TSCTF1C0B0D | Cartridge | High Flux-optimized | No | No | E-ETP | Code 0 | 10" |
TSCTF1C0B0P | Cartridge | High Flux-optimized | No | Yes | E-ETP | Code 0 | 10" |
TSCTF1C0BKD | Cartridge | High Flux-optimized | Yes | No | E-ETP | Code 0 | 10" |
TSCTF1C0BKP | Cartridge | High Flux-optimized | Yes | Yes | E-ETP | Code 0 | 10" |
TSCTF1C0RKD | Cartridge | High Flux-optimized | No | No | Kalrez® 6375UP | Code 0 | 10" |
TSCTF2C0B0D | Cartridge | High Flux-optimized | No | No | E-ETP | Code 0 | 20" |
TSCTF2C0B0P | Cartridge | High Flux-optimized | No | Yes | E-ETP | Code 0 | 20" |
TSCTF300B0D | Cartridge | High Flux-optimized | No | No | E-ETP | Code 0 | 30" |
TSPT15CM31SD | P1500 Small Disposable | Low Flux | N/A | No | N/A | 3/8" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | 4" |
TSPT30JM21SD | P3000 Small Disposable | Low Flux | N/A | No | N/A | In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting | 8" |
TSVT31C902SP | Chem-Line™ I Large Disposable | High Flux | N/A | Yes | N/A | T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | 30" |
TSVTF1C942SP | Chem-Line™ I Large Disposable | High Flux-optimized | N/A | Yes | N/A | T-line, rotated core vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting | 10" |