Torrento® S Filter

Best-in-class, leading-edge filtration of solvents and BEOL chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.

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Applications Torrento® S Filter Applications

Industry: Semiconductor, Chemical Manufacturing
Process: Wet Etch and Clean, Facilities
Chemistry: Solvent
Installation Point: Point of Tool, Point of Dispense, Bulk

Specifications

Drawings

Performance Data

Product Specifications

		Torrento S Series ATE/AT3/ATF Cartridges	Torrento S Series 10 nm ATE/AT3/ATF Chem-Line I and II
Materials:	Membrane:	Prewet, nondewetting PTFE
	Supports	PFA
	Catridge o-ring options	E-FKM, E-ETP, Kalrez® (6375UP)	-
	Shell	PFA
Retention rating:		10 nm
Membrane area:	10"	ATE 10" 2 m² (21 ft²)
		ATE 10" 2.4 m² (25.8 ft²)
		ATF 10" 2.4 m2 (25.8 ft2) ATF 20" Cartridges 4.8 m2 (51.7 ft2)	ATF 20" Disposables N/A
Cartridge connections:		Code 0 (2-222) o-rings
Maximum operating conditions:	Maximum operating pressure:	0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F)
		0.097 MPa (0.97 bar; 14 psi) @ 200°C (392°F)
	Maximum forward differential pressure	0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F)
		0.05 MPa (0.52 bar, 7.5 psi) @ 200°C (392°F)
	Maximum reverse pressure	0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F)
	Maximum operating temperature:	200°C (392°F)
Metallic extractables:	UCM-16 clean	Testing conducted for 16 metals
Other extractables (prewet only):	UCM-16 clean	TOC, CI, NVR

		Torrento S Series 10 nm Small Disposables 1500/3000
Membrane area:	10"	1500 type 0.19 m² (2.05 ft²)
		3000 type 0.44 m² (4.74 ft²)
Maximum operating conditions:	Maximum operating pressure:	0.59 MPa (5.9 bar, 86 psi) @ 25°C (77°F)
		0.19 MPa (1.9 bar, 28 psi) @ 95°C (203°F)
	Maximum forward differential pressure	0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F)
		0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F)
	Maximum reverse pressure	0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F)
	Maximum operating temperature:	95°C (203°F)
Notes: For solvents, select the "Dry" option. For aqueous-solvent blends, select the "Prewet" option. All Torrento S-series 10 nm filter configurations are PFOA free.

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Nov. 15, 2015 Data Sheet Torrento® S Series Filters

Download PDF 1.8 MB

Part Numbers

Torrento® S Filter Part Numbers

Part Number	Form Factor	Typical Flow Rate	Chemlock Key	Prewet	O-ring	Connection	Length
TS2TF1C102SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male offset, 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1C102SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male offset, 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1C142SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male offset, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1C142SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male offset, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1CM01SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1CM01SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1CM21FP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male, 1/3" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	10"
TS2TF1CM21SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male, 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	10"
TS2TF1CM41FD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male, 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	10"
TS2TF1CM41FP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male, 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	10"
TS2TF1CM41SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	In-line male, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TS2TF1CM41SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	In-line male, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	10"
TSCT31C0B0P	Cartridge	High Flux	No	Yes	E-ETP	Code 0	10"
TSCT31C0BKP	Cartridge	High Flux	Yes	Yes	E-ETP	Code 0	10"
TSCTE1C0B0D	Cartridge	Mid-High Flux	No	No	E-ETP	Code 0	10"
TSCTE1C0RKP	Cartridge	Mid-High Flux	Yes	Yes	Kalrez® 6375UP	Code 0	10"
TSCTF1C0B0D	Cartridge	High Flux-optimized	No	No	E-ETP	Code 0	10"
TSCTF1C0B0P	Cartridge	High Flux-optimized	No	Yes	E-ETP	Code 0	10"
TSCTF1C0BKD	Cartridge	High Flux-optimized	Yes	No	E-ETP	Code 0	10"
TSCTF1C0BKP	Cartridge	High Flux-optimized	Yes	Yes	E-ETP	Code 0	10"
TSCTF1C0RKD	Cartridge	High Flux-optimized	No	No	Kalrez® 6375UP	Code 0	10"
TSCTF1C0RKP	Cartridge	High Flux-optimized	Yes	Yes	Kalrez® 6375UP	Code 0	10"
TSCTF2C0B0D	Cartridge	High Flux-optimized	No	No	E-ETP	Code 0	20"
TSCTF2C0B0P	Cartridge	High Flux-optimized	No	Yes	E-ETP	Code 0	20"
TSCTF2C0BKP	Cartridge	High Flux-optimized	Yes	Yes	E-ETP	Code 0	20"
TSCTF300B0D	Cartridge	High Flux-optimized	No	No	E-ETP	Code 0	30"
TSCTF300B0P	Cartridge	High Flux-optimized	No	Yes	E-ETP	Code 0	30"
TSDT31CT02HP	Chem-Line™ I Large Disposable	High Flux	N/A	Yes	N/A	T-line, rotated vent, 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar® fitting	30"
TSDTF1C902SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSDTF1C942SD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSDTF1C942SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSDTF1CT02HD	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	No	N/A	T-line, rotated vent, 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar® fitting	10"
TSDTF1CT02HP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	T-line, rotated vent, 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar® fitting	10"
TSDW3CE0P3PM	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	30"
TSPT15CM31SD	P1500 Small Disposable	Low Flux	N/A	No	N/A	3/8" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	4"
TSPT15CM31SP	P1500 Small Disposable	Low Flux	N/A	Yes	N/A	3/8" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	4"
TSPT15JM21SD	P1500 Small Disposable	Low Flux	N/A	No	N/A	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	4"
TSPT30CM31SP	P3000 Small Disposable	Low Flux	N/A	Yes	N/A	3/8" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	8"
TSPT30JM21SD	P3000 Small Disposable	Low Flux	N/A	No	N/A	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	8"
TSVT31C902SD	Chem-Line™ I Large Disposable	High Flux	N/A	No	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	30"
TSVT31C902SP	Chem-Line™ I Large Disposable	High Flux	N/A	Yes	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	30"
TSVT31C942SD	Chem-Line™ I Large Disposable	High Flux	N/A	No	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	30"
TSVT31C942SP	Chem-Line™ I Large Disposable	High Flux	N/A	Yes	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	30"
TSVTE1C902SD	Chem-Line™ I Large Disposable	Mid-High Flux	N/A	No	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSVTE1C902SP	Chem-Line™ I Large Disposable	Mid-High Flux	N/A	Yes	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSVTE1C942SD	Chem-Line™ I Large Disposable	Mid-High Flux	N/A	No	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSVTE1C942SP	Chem-Line™ I Large Disposable	Mid-High Flux	N/A	Yes	N/A	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSVTF1C902SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	T-line, rotated vent, 3/4' inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"
TSVTF1C942SP	Chem-Line™ I Large Disposable	High Flux-optimized	N/A	Yes	N/A	T-line, rotated core vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	10"