Protego® Plus IPA Purifier
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Applications
- Industry: Semiconductor (Wet Clean and Clean)
- Chemistry: Solvent
- Installation Point: Point-of-Tool
Specifications
| Chem-Line™ II ATE 10" Disposable | P3000 Disposable | P1500 Disposable | |||
| Materials: | Membrane | PTFE | |||
| Supports, shell | PFA | ||||
| Purification capable: | Metal removal | ||||
| Purification capacity: | 4.30 meq | 1.18 meq | 0.48 meq | ||
| Retention rating: | 15 nm | ||||
| Fittings sizes | 1⁄2" I/O - 1⁄4” V/D Super 300 Type Pillar® |
1⁄2" I/O - 1⁄4” V/D Super 300 Type Pillar |
1⁄2" I/O - 1⁄4” V/D Super 300 Type Pillar |
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| 3/4" I/O - 1⁄4” V/D Super 300 Type Pillar |
3/8" I/O - 1⁄4” V/D Super 300 Type Pillar |
3/8" I/O - 1⁄4” V/D Super 300 Type Pillar |
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| 3/4" I/O - 1⁄2” V/D Super 300 Type Pillar |
8 mm I/O - 6mm V/D Super 300 Type Pillar |
8 mm I/O - 6 mm V/D Super 300 Type Pillar |
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| 1" I/O - 1⁄4” V/D Super 300 Type Pillar |
8 mm I/O - 6 mm V/D Super 300 Type Pillar |
8 mm I/O - 6 mm V/D Super 300 Type Pilla |
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| 1" I/O - 1⁄2” V/D Super 300 Type Pillar |
3/8" I/O - 1⁄4” V/D Flaretek |
3/8" I/O - 1⁄4” V/D Flaretek |
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| 3⁄4” I/O – 1⁄4” V/D Flaretek® |
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| 3⁄4” I/O – 1⁄2” V/D Flaretek |
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| 1” I/O – 1⁄4” V/D Flaretek |
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| NVR extractables: | ≤1.0 mg/device (IPA) |
≤0.4 mg/device (IPA) |
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| Metals extractables: | <3 ug/device | ||||
| Filtration area: | 1.77 m2 (19.05 ft2) | 0.49 m2 (5.27 ft2) | 0.20 m2 (2.15 ft2) | ||
| Flow resistance with 2 L/min IPA @ 1.96 cP (25ºC): |
11.5 kPa @ Inlet/Outlet 1" |
39 kPa | 99 kPa | ||
| Flow resistance with 2 L/min IPA @ 0.97 cP (about 50ºC): |
9.2 kPa @ Inlet/Outlet 1" |
19 kPa | 49 kPa | ||
| Operating conditions: | Temperature rating | 70ºC (158ºF) | |||
| Maximum operating pressure | 0.58 MPa @ 25ºC (77ºF) | 0.44 MPa @ 25ºC (77ºF) | |||
| Maximum forward differential pressure |
0.44 MPa @ 25ºC (77ºF) | 0.39 MPa @ 25ºC (77ºF) | |||
| Maximum reverse differential pressure |
0.34 MPa @ 25ºC (77ºF) | 0.26 MPa @ 25ºC (77ºF) | |||
Successfully Opted for software Updates
Part Numbers
| Part Number | Form Factor | Purification Capacity | IPA Prewet | Length | Connection |
|---|---|---|---|---|---|
| PIDWACE0F2FM | Chem-Line™ II Large Disposable | 4.30 meq/unit | No | 10" | 3/4" inlet/outlet, 1/2" vent/drain, Flaretek® fitting |
| PIDWACE0P3PM | Chem-Line™ II Large Disposable | 4.30 meq/unit | No | 10" | 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting |
| PIDWACE4P3PM | Chem-Line™ II Large Disposable | 4.30 meq/unit | No | 10" | 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting |
| PIPW15C2S | P1500 Small Disposable | 0.48 meq/unit | No | 5" | 1/2" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW15C3F | P1500 Small Disposable | 0.48 meq/unit | No | 5" | 3/8" inlet/outlet, Flaretek® fitting |
| PIPW15C3S | P1500 Small Disposable | 0.48 meq/unit | No | 5" | 3/8" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW15C3SA | P1500 Small Disposable | 0.48 meq/unit | Yes | 5" | 3/8" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW15C8P | P1500 Small Disposable | 0.48 meq/unit | No | 5" | 8 mm inlet/outlet, Super Type Pillar® fitting |
| PIPW15C8S | P1500 Small Disposable | 0.48 meq/unit | No | 5" | 8 mm inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW15C8SA | P1500 Small Disposable | 0.48 meq/unit | Yes | 5" | 8 mm inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW30C2S | P3000 Small Disposable | 0.48 meq/unit | No | 5" | 1/2" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW30C2SA | P3000 Small Disposable | 1.18 meq/unit | Yes | 5" | 1/2" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW30C3F | P3000 Small Disposable | 1.18 meq/unit | No | 5" | 3/8" inlet/outlet, Flaretek® fitting |
| PIPW30C3FA | P3000 Small Disposable | 1.18 meq/unit | Yes | 5" | 3/8" inlet/outlet, Flaretek® fitting |
| PIPW30C3S | P3000 Small Disposable | 1.18 meq/unit | No | 5" | 3/8" inlet/outlet, Super Type 300 Pillar® fitting |
| PIPW30C3SA | P3000 Small Disposable | 1.18 meq/unit | Yes | 5" | 3/8" inlet/outlet, Super Type 300 Pillar® fitting |