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Liquid Purifiers

Removal of metal ion contamination from ultrapure water and solvents.

Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE, PS and UPE membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.

Featured White Paper

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Transitioning from Preventable to Pervasive Defectivity in Semiconductor Manufacturing
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Featured White Paper

download-pdf
Transitioning from Preventable to Pervasive Defectivity in Semiconductor Manufacturing
Download Here

Featured White Paper

download-pdf
Transitioning from Preventable to Pervasive Defectivity in Semiconductor Manufacturing
Download Here
Narrow Your Selection
  • Brand Name
  • Chemistry
  • Feature Size (Layer)
  • Industry
  • Process
Purasol™ SP/SN Solvent Purifiers
Purasol™ SP/SN Solvent Purifiers
Purasol™ SP/SN Solvent Purifiers
Ultraclean solvent purification with total metal removal performance
Brand Name
  • Purasol™
 Chemistry
  • Solvents
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Bulk
Protego® Plus IPA Purifier
Protego® Plus IPA Purifier
Protego® Plus IPA Purifier
High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications
Brand Name
  • Protego®
 Chemistry
  • Solvents
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Point of Tool
Protego® Plus HT and HTX Purifiers
Protego® Plus HT and HTX Purifiers
Protego® Plus HT and HTX Purifiers
All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80°C)
Brand Name
  • Protego®
 Chemistry
  • DI Water
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Point of Tool
Protego® Plus LT Purifier
Protego® Plus LT Purifier
Protego® Plus LT Purifier
All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at low temperatures (less than 60°C)
Brand Name
  • Protego®
 Chemistry
  • DI Water
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
 Installation Point
  • Point of Tool
Protego® AT 2 nm Purifier
Protego® AT 2 nm Purifier
Protego® AT 2 nm Purifier
All-in-one purifier/filter designed for use in sub-7 nm device node fabs in aggressive solvent applications at the POU, in chemical delivery systems, or in bulk chemical manufacturing
Brand Name
  • Protego®
 Chemistry
  • Solvents
 Feature Size (Layer)
  • <7 nm
 Installation Point
  • Point of Tool
Protego® AT 5 nm Purifier
Protego® AT 5 nm Purifier
Protego® AT 5 nm Purifier
All-in-one purifier/filter designed for use in sub-16 nm device node fabs in aggressive solvent applications at the POU, in chemical delivery systems, or in bulk chemical manufacturing
Brand Name
  • Protego®
 Chemistry
  • Solvents
 Feature Size (Layer)
  • <16 nm
 Installation Point
  • Point of Tool
Purasol™ LS2 Solvent Purifier
Purasol™ LS2 Solvent Purifier
Purasol™ LS2 Solvent Purifier
Ultraclean solvent purification with total metal removal performance
Brand Name
  • Purasol™
 Industry
  • Semiconductor
 Process
  • Photolithography
Related Product Categories
Liquid Filters

We offer a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.

Liquid Filter Housings

Liquid filter housings provide a variety of performance and operator safety benefits. Polymer housings, or those with a PTFE lining, are typically utilized in higher cleanliness applications and those that are more sensitive to metals leaching into the process materials. Stainless steel housings are typically used in higher pressure, elevated temperature applications.
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