The PDS®-A gas package is used for high-volume gas applications and specialty processes. The package stores and delivers highly toxic gases subatmospherically, substantially reducing the risk of catastrophic gas release and providing a significant safety and equipment damage benefit.
• The PDS-A package eliminates the possibility of significant or catastrophic gas release
• Material purity of a solid source for enhanced Performance
• Excellent cylinder life and capacity reduce implant maintenance cost
• Rapid species change times contribute to enhanced productivity
• Significant cost avoidance per incident savings, including equipment damage, tool downtime, evacuation costs and injury in a typical Fab
A gas package isused for high-volume gasapplications and specialtyprocesses. Stores and delivers highlytoxic gases sub-atmospherically, eliminatingthe risk of catastrophic gasrelease and providing asignificant safety andequipment damage benefi
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ApplicationsPDS®-A Pure Delivery Source Applications