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  • Cylinder Volume
  • Gases
  • System Type
  • Industry
  • Process
Store and delivers gas subatmospherically
Cylinder Volume
  • 2.5L
  • 7.6L
Gases
  • AsH3
  • Natural BF3
  • Enriched BF3
  • PH3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
Store and delivers gas subatmospherically
Cylinder Volume
  • 0.44L
  • 2.2L
  • 6.6L
Gases
  • AsH3
  • Enriched 11 BF3
  • Enriched 72 GeF4
  • Enriched 72 Plus GeF4
  • Natural GeF4
  • PH3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
Provides superior safety and performance over traditional high-pressure sources
Cylinder Volume
  • 2.2L
  • 6.6L
Gases
  • Natural BF3
  • Enriched BF3
  • Enriched 72 GeF4
  • Enriched 72 Plus GeF4
System Type
  • Subatmospheric delivery (SAGS type II)
Industry
  • Semiconductor
Store and delivers gas subatmospherically
Cylinder Volume
  • 17L
  • 50L
Gases
  • AsH3
  • PH3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Positive pressure delivery
Cylinder Volume
  • 6.6L
  • 50L
Gases
  • Enriched 11 BF3
System Type
  • Positive pressure delivery @100 psig
Industry
  • Flat Planel Display
Subatmospheric delivery
Cylinder Volume
  • 50L
Gases
  • Natural BF3
  • Enriched 11 BF3
System Type
  • Subatmospheric delivery (SAGS type II)
Industry
  • Semiconductor
  • Flat Planel Display
Safe and efficient technology for delivering toxic gases
Cylinder Volume
  • 16L
  • 49L
Gases
  • PH3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
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