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Narrow Your Selection
  • Industry
  • Process
  • Cylinder Volume
  • Gases
  • System Type
Store and delivers gas subatmospherically
Industry
  • Semiconductor
Process
  • Ion Implantation
Cylinder Volume
  • 2.5L
  • 7.6L
Gases
  • AsH3
  • Natural BF3
  • Enriched BF3
  • PH3
Store and delivers gas subatmospherically
Industry
  • Semiconductor
Process
  • Ion Implantation
Cylinder Volume
  • 0.44L
  • 2.2L
  • 6.6L
Gases
  • AsH3
  • Enriched 11 BF3
  • Enriched 72 GeF4
  • Enriched 72 Plus GeF4
  • Natural GeF4
  • PH3
Provides superior safety and performance over traditional high-pressure sources
Industry
  • Semiconductor
Process
  • Ion Implantation
Cylinder Volume
  • 2.2L
  • 6.6L
Gases
  • Natural BF3
  • Enriched BF3
  • Enriched 72 GeF4
  • Enriched 72 Plus GeF4
Store and delivers gas subatmospherically
Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Process
  • Plasma Immersion Doping
  • Ion Implantation
Cylinder Volume
  • 17L
  • 50L
Gases
  • AsH3
  • PH3
Positive pressure delivery
Industry
  • Flat Planel Display
Process
  • Plasma Immersion Doping
  • Ion Implantation
  • Epitaxy
  • Diffusion
Cylinder Volume
  • 6.6L
  • 50L
Gases
  • Enriched 11 BF3
Subatmospheric delivery
Industry
  • Semiconductor
  • Flat Planel Display
Process
  • Plasma Immersion Doping
  • Ion Implantation
  • Epitaxy
  • Diffusion
Cylinder Volume
  • 50L
Gases
  • Natural BF3
  • Enriched 11 BF3
Safe and efficient technology for delivering toxic gases
Industry
  • Semiconductor
Process
  • Deposition
Cylinder Volume
  • 16L
  • 49L
Gases
  • PH3
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