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Gas Delivery Cylinder Systems
Safe and efficient technologies to deliver toxic gases
We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.
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Showing 7 Products
Store and delivers gas subatmospherically
Cylinder Volume
- 17L
- 50L
- AsH3
- PH3
- Subatmospheric storage and delivery (SAGS type I)
- Semiconductor
- Flat Panel Display
- Solar
Subatmospheric delivery
Cylinder Volume
- 50L
- Natural BF3
- Enriched 11 BF3
- Subatmospheric delivery (SAGS type II)
- Semiconductor
- Flat Planel Display
Positive pressure delivery
Cylinder Volume
- 6.6L
- 50L
- Enriched 11 BF3
- Positive pressure delivery @100 psig
- Flat Planel Display
Store and delivers gas subatmospherically
Cylinder Volume
- 2.5L
- 7.6L
- AsH3
- Natural BF3
- Enriched BF3
- PH3
- Subatmospheric storage and delivery (SAGS type I)
- Semiconductor
Store and delivers gas subatmospherically
Cylinder Volume
System Type
- 0.44L
- 2.2L
- 6.6L
- AsH3
- Enriched 11 BF3
- Enriched 72 GeF4
- Enriched 72 Plus GeF4
- Subatmospheric storage and delivery (SAGS type I)
- Semiconductor
Provides superior safety and performance over traditional high-pressure sources
Cylinder Volume
- 2.2L
- 6.6L
- Natural BF3
- Enriched BF3
- Enriched 72 GeF4
- Enriched 72 Plus GeF4
- Subatmospheric delivery (SAGS type II)
- Semiconductor
Safe and efficient technology for delivering toxic gases
Cylinder Volume
- 16L
- 49L
- PH3
- Subatmospheric storage and delivery (SAGS type I)
- Semiconductor
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