SAGE® Subatmospheric Gas Storage and Delivery Source
The SAGE® gas package is based on the SDS® gas package technology and was designed specifically for use in CVD and other gas deposition processes. It houses specially-formulated carbon-based adsorbents to store and delivery gas subatmospherically.
Virtually eliminates the potential for catastrophic releases of highly toxic gas.
Reduces the number of cylinder changes.
Provides a highly consistent dopant gas source.
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ApplicationsSAGE® Subatmospheric Gas Storage and Delivery Source Applications