Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
SDS®3 Safe Delivery Source® is the safest technology available for delivering highly toxic gases. Designed using specially formulated carbon-based adsorbents in the form of pucks, SDS3 systems both store and deliver gas subatmospherically.
Cylinder pressure (storage and delivery) below one atmosphere
Eliminates the possiblity of significant or catastrophic gas release
Available in two sizes (2.5 liters, 7.6 liters)
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Interested in SDS®3 Safe Delivery Source?
Contact your Entegris account manager or