OxiMax™ Coating
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- AR properties make it suitable for coating IR optics
- Semiconductor chamber components
Specifications
Substrate: | Compatibility: Most metals and ceramics |
Size: Up to 91 cm (36") | |
Geometry: Any shape, including complex geometries | |
Structure: | Amorphous |
Temperature: | Deposition: 150°C (302°F) |
Use: 1000°C (1832°F) | |
Coating thicknes: | A few nm to over 100 μm |
Electrical resistivity: | ~10-13 Ω-cm |
Harness: | 800 DPHN |
Dielectric strength: | 80 V/micron |
Purity: | 99.95% |
Wear resistant: | Very good |
Corrosion resistance: | Excellent aqueous corrosion resistance |
Resistant to acids and alkalis |
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