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SilicoMax™ Coating

SilicoMax is a dense, micro-conformal, high-purity silicon carbide coating that has very low residual stress. It is amorphous and exhibits high electrical resistivity and wear resistance. This coating exhibits high reflectance/high emissivity in the extreme ultraviolet and can be deposited on a wide variety of substrates.   

  • High-purity, dense and micro-conformal coating with very low residual stress
  • Oxidation resistant, especially in the presence of moisture
  • High electrical resistivity
  • Corrosion resistant in acids and alkalis
  • Low-temperature plasma deposition process
  • Coating composition can be tailored from silicon rich to stoichiometric silicon carbide
  • Read More Read Less
Interested in SilicoMax™ Coating?

Contact your Entegris account manager or  contact us

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