DFP Graphite
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Ion Implant
- Plasma Etch
- Deposition
Specifications
Particle size: | 5 µm (200 µin) |
Pore size:1 | 0.8 µm (32 µin) |
Coefficient of thermal expansion:2 | 8.1 µm/m °C (4.5 µin/in °F) |
Compressive strength: | 140 MPa (20,000 psi) |
Flexural strength:3 | 86 MPa (12,500 psi) |
Tensile strength:4 | 60 MPa (8700 psi) |
Shore hardness: | 74 |
Electrical resistivity: | 1475 µΩ-cm (580 µΩ-in) |
Apparent density: | 1.77 g/cm3 (0.064 lb/in3) |
Thermal conductivity: | 95 W/m-K (55 Btu-ft/hr/ft2 °F) |
Oxidation threshold:5 | 470°C (880°F) |
1Measured using Hg porosimetry method. 2Average for temperature range of RT - 800°C. 3Measured using 4-point bend method. 4Estimated at 70% of flexural strength. 5Temperature that results in 1% wt. loss in 24 hrs. Oxidation threshold increases by approximately 100 °C if graphite is purified. Test sample size equals 0.5” x 0.5” x 1.0”.
Successfully Opted for software Updates
Part Number | Material Type |
---|---|
DE-12482 | Pyrolytically Coated Purified Sample |