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Semiconductor Graphite Grades

Our semiconductor graphite grades are segmented by grain size. These include 1, 5, and 10 micron, which are then further segmented by application.

Through the power of our award-winning solutions and our technology expertise, we provide customers with innovative, science-based solutions to their toughest technology challenges. Our Entegris manufactured graphite grades are segmented by grain size. These include 1, 5, and 10 micron, which are then further segmented by application.

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Narrow Your Selection
  • Shore Hardness
  • Compressive Strength, MPa (psi)
  • Flexural Strength, MPa (psi)
  • Tensile Strength, MPa (psi)
  • Industry
  • Process
ZEE-2 Graphite
ZEE-2 Graphite
ZEE-2 Graphite
See specifications for ZEE-2 semiconductor graphite. This hard, wear-resistant material offers improved performance in current and next generation implant equipment.
Shore Hardness
  • 100
 Apparent Density, g/cm3 (lb/in3)
  • 1.77 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.4 (4.65)
 Compressive Strength, MPa (psi)
  • 193 (28,000)
SFG Graphite
SFG Graphite
SFG Graphite
Learn more about our SFG semiconductor graphite for ion implant, plasma etch and deposition applications.
Shore Hardness
  • 84
 Apparent Density, g/cm3 (lb/in3)
  • 1.77 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.1 (4.4)
 Compressive Strength, MPa (psi)
  • 166 (24,100)
SCF Graphite
SCF Graphite
SCF Graphite
SCF graphite has a five micron grain size microstructure with high strengths that generates fewer particles and resists wear better than competitive materials.
Shore Hardness
  • 91
 Apparent Density, g/cm3 (lb/in3)
  • 1.77 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.5 (4.7)
 Compressive Strength, MPa (psi)
  • 163 (23,600)
HPD Graphite
HPD Graphite
HPD Graphite
See specifications for HPD semiconductor graphite. Ideal material for carbon target or high density applications.
Shore Hardness
  • 80
 Apparent Density, g/cm3 (lb/in3)
  • 1.76 (0.0636)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.1 (4.5)
 Compressive Strength, MPa (psi)
  • 156 (22,600)
DFP Graphite
DFP Graphite
DFP Graphite
See benefits for DFP semiconductor graphite. Ideal for plasma etch, deposition and structural components in ion implant applications.
Shore Hardness
  • 74
 Apparent Density, g/cm3 (lb/in3)
  • 1.77 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.1 (4.5)
 Compressive Strength, MPa (psi)
  • 140 (20,000)
CZR Graphite
CZR Graphite
CZR Graphite
See benefits for Semiconductor CZR graphite. With a uniform microstructure, this low density economical material is ideal for legacy beamline components.
Shore Hardness
  • 70
 Apparent Density, g/cm3 (lb/in3)
  • 1.65 (0.0596)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 7.8 (4.3)
 Compressive Strength, MPa (psi)
  • 93 (13,500)
TRA Graphite
TRA Graphite
TRA Graphite
See specifications for TRA semiconductor graphite. Ideal for structural or legacy components.
Shore Hardness
  • 72
 Apparent Density, g/cm3 (lb/in3)
  • 1.72 (0.0621)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 7.9 (4.4)
 Compressive Strength, MPa (psi)
  • 118 (17,100)
PLS Graphite
PLS Graphite
PLS Graphite
Semiconductor PLS graphite offers high thermal and electrical conductivity. This specialty material is ideal for plasma etch and deposition.
Shore Hardness
  • 68
 Apparent Density, g/cm3 (lb/in3)
  • 1.77 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 8.2 (4.55)
 Compressive Strength, MPa (psi)
  • 100 (14,500)
Related Product Categories
Premium Graphite Components

Our graphite is tightly controlled to produce materials that have a uniform microstructure and the right balance of strength, grain size and hardness to offer optimum performance for your intended applications.
Glass Forming Graphite Grades

Our GF and GF-LT graphite materials are produced using a proprietary process that enhances material properties, surpassing that of traditional graphites.The properties of these grades have been developed to optimally match the smart glass the molds are being used for. Our materials improve cost of ownership, increase yield, and reduce operational expenses.
GLASSMATE® Components

To view our complete portfolio of premium graphite components we will redirect you to Entegris' POCO Materials web site.

poco.entegris.com.
Graphite Processing Options

Our graphite materials can be purified to less than 5 ppm, densified to reduce open porosity by as much as 80%, or impregnated with resins, oxidation inhibitors or metals. Surface treatments and coatings are available to provide a sealed surface, to improve wear characteristics or to reduce particles.
Industrial Graphite Grades

From aerospace to energy, the breadth and depth of our graphite portfolio meets all your application needs.

For more information, please visit Industrial Graphite Grades on poco.entegris.com. 
Life Sciences Graphite Grades

Our graphite materials have been a mainstay in the implantable medical device market for over 40 years. The unique tungsten blended material combines the quality of our high-strength premium graphite with the added benefit of being radiopaque. These qualities make our materials the only choice for pyrocarbon-coated substrates used by replacement joint and mechanical heart valve manufacturers around the world.
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