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- Ion implant components
Specifications
Particle size: | 5 µm (200 µin) |
Pore size:1 | 0.8 µm (32 µin) |
Coefficient of thermal expansion:2 | 7.8 µm/m °C (4.3 µin/in °F) |
Compressive strength: | 93 MPa (13,500 psi) |
Flexural strength:3 | 61 MPa (8800 psi) |
Tensile strength:4 | 43 MPa (6200 psi) |
Shore hardness: | 70 |
Electrical resistivity: | 1840 µΩ-cm (725 µΩ-in) |
Apparent density: | 1.65 g/cm3 (0.0596 lb/in3) |
Thermal conductivity: | 76 W/m-K (44 Btu-ft/hr/ft2 °F)5 |
Oxidation threshold6: | 440° C (820° F) |
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