PLS Graphite
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1Measured using Hg porosimetry method. 2Average for temperature range of RT - 800°C. 3Measured using 4-point bend method. 4Estimated at 70% of flexural strength. 5Temperature that results in 1% wt. loss in 24 hrs. Oxidation threshold increases by approximately 100°C if graphite is purified. Test sample size equals 0.5” x 0.5” x 1.0”.
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Applications
- Plasma etch
- Deposition
Specifications
| Particle size: | 10 µm (400 µin) |
| Pore size:1 | 1.5 µm (60 µin) |
| Coefficient of thermal expansion:2 | 8.2 µm/m °C (4.55 µin/in °F) |
| Compressive strength: | 100 MPa (14,500 psi) |
| Flexural strength:3 | 60 MPa (8700 psi) |
| Tensile strength:4 | 42 MPa (6100 psi) |
| Hardness: | 68 Shore |
| Electrical resistivity: | 1460 µΩ-cm (575 µΩ-in) |
| Apparent density: | 1.77 g/cm3 (0.064 lb/in3) |
| Thermal conductivity: | 105 W/m-K (60 BTU-ft/hr/ft2 °F) |
| Oxidation threshold:5 | 460°C (860°F) |
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Part Numbers
| Part Number | Material Type |
|---|---|
| DE-17337 | Purified Sample |